6/1/2010	8:57:51 AM	Bypass valve closed
6/1/2010	8:57:51 AM	Main Vac valve closed
6/1/2010	8:58:01 AM	Main Vac valve opened
6/1/2010	8:58:02 AM	Bypass valve opened
6/1/2010	8:58:41 AM	Tube furnace set to 100
6/1/2010	9:00:46 AM	Tube furnace set to 0
6/1/2010	9:00:50 AM	Recipe started at 9:00 AM
6/1/2010	9:00:50 AM	Helium valve closed
6/1/2010	9:00:50 AM	BCl3 valve closed
6/1/2010	9:00:50 AM	PH3 valve closed
6/1/2010	9:00:50 AM	SiCl4 pre valve closed
6/1/2010	9:00:50 AM	SiCl4 post valve closed
6/1/2010	9:00:50 AM	Main Vac valve closed
6/1/2010	9:00:50 AM	Bypass valve closed
6/1/2010	9:00:50 AM	Bubbler valve closed
6/1/2010	9:00:50 AM	H2 valve opened
6/1/2010	9:00:50 AM	Helium MFC set to  0.000000
6/1/2010	9:00:50 AM	H2 MFC set to  500.000000
6/1/2010	9:00:50 AM	BCl3 MFC set to  0.000000
6/1/2010	9:00:50 AM	PHl3 MFC set to  0.000000
6/1/2010	9:00:50 AM	SiCl4 MFC set to  0.000000
6/1/2010	9:00:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:00:50 AM	Tube furnace set to 0
6/1/2010	9:02:11 AM	Helium valve closed
6/1/2010	9:02:11 AM	BCl3 valve closed
6/1/2010	9:02:11 AM	PH3 valve closed
6/1/2010	9:02:11 AM	SiCl4 pre valve closed
6/1/2010	9:02:11 AM	SiCl4 post valve closed
6/1/2010	9:02:11 AM	Main Vac valve closed
6/1/2010	9:02:11 AM	Bypass valve closed
6/1/2010	9:02:11 AM	H2 valve opened
6/1/2010	9:02:11 AM	Bubbler valve opened
6/1/2010	9:02:11 AM	Helium MFC set to  0.000000
6/1/2010	9:02:11 AM	H2 MFC set to  500.000000
6/1/2010	9:02:11 AM	BCl3 MFC set to  0.000000
6/1/2010	9:02:11 AM	PHl3 MFC set to  0.000000
6/1/2010	9:02:11 AM	SiCl4 MFC set to  0.000000
6/1/2010	9:02:11 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:02:11 AM	Tube furnace set to 1000
6/1/2010	9:22:11 AM	Helium valve closed
6/1/2010	9:22:11 AM	PH3 valve closed
6/1/2010	9:22:11 AM	Main Vac valve closed
6/1/2010	9:22:11 AM	Bypass valve closed
6/1/2010	9:22:11 AM	H2 valve opened
6/1/2010	9:22:11 AM	BCl3 valve opened
6/1/2010	9:22:11 AM	SiCl4 pre valve opened
6/1/2010	9:22:11 AM	SiCl4 post valve opened
6/1/2010	9:22:11 AM	Bubbler valve opened
6/1/2010	9:22:11 AM	Helium MFC set to  0.000000
6/1/2010	9:22:11 AM	H2 MFC set to  500.000000
6/1/2010	9:22:11 AM	BCl3 MFC set to  35.000000
6/1/2010	9:22:11 AM	PHl3 MFC set to  0.000000
6/1/2010	9:22:11 AM	SiCl4 MFC set to  50.000000
6/1/2010	9:22:11 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:22:11 AM	Tube furnace set to 1000
6/1/2010	9:34:11 AM	H2 valve closed
6/1/2010	9:34:11 AM	BCl3 valve closed
6/1/2010	9:34:11 AM	PH3 valve closed
6/1/2010	9:34:11 AM	SiCl4 pre valve closed
6/1/2010	9:34:11 AM	SiCl4 post valve closed
6/1/2010	9:34:11 AM	Main Vac valve closed
6/1/2010	9:34:11 AM	Bypass valve closed
6/1/2010	9:34:11 AM	Helium valve opened
6/1/2010	9:34:11 AM	Bubbler valve opened
6/1/2010	9:34:11 AM	Helium MFC set to  500.000000
6/1/2010	9:34:11 AM	H2 MFC set to  0.000000
6/1/2010	9:34:11 AM	BCl3 MFC set to  0.000000
6/1/2010	9:34:11 AM	PHl3 MFC set to  0.000000
6/1/2010	9:34:11 AM	SiCl4 MFC set to  0.000000
6/1/2010	9:34:11 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:34:11 AM	Tube furnace set to 0
6/1/2010	9:54:11 AM	Helium valve closed
6/1/2010	9:54:11 AM	H2 valve closed
6/1/2010	9:54:11 AM	BCl3 valve closed
6/1/2010	9:54:11 AM	PH3 valve closed
6/1/2010	9:54:11 AM	SiCl4 pre valve closed
6/1/2010	9:54:11 AM	SiCl4 post valve closed
6/1/2010	9:54:11 AM	Main Vac valve closed
6/1/2010	9:54:11 AM	Bypass valve closed
6/1/2010	9:54:11 AM	Bubbler valve closed
6/1/2010	9:54:11 AM	Helium MFC set to  0.000000
6/1/2010	9:54:11 AM	H2 MFC set to  0.000000
6/1/2010	9:54:11 AM	BCl3 MFC set to  0.000000
6/1/2010	9:54:11 AM	PHl3 MFC set to  0.000000
6/1/2010	9:54:11 AM	SiCl4 MFC set to  0.000000
6/1/2010	9:54:11 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:54:11 AM	Tube furnace set to 0
6/1/2010	9:54:12 AM	Run finished at 9:54 AM
6/1/2010	10:27:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	10:27:51 AM	Recipe started at 10:27 AM
6/1/2010	10:27:51 AM	Helium valve closed
6/1/2010	10:27:51 AM	H2 valve closed
6/1/2010	10:27:51 AM	BCl3 valve closed
6/1/2010	10:27:51 AM	PH3 valve closed
6/1/2010	10:27:51 AM	SiCl4 pre valve closed
6/1/2010	10:27:51 AM	SiCl4 post valve closed
6/1/2010	10:27:51 AM	Main Vac valve closed
6/1/2010	10:27:51 AM	Bubbler valve closed
6/1/2010	10:27:51 AM	Bypass valve opened
6/1/2010	10:27:51 AM	Helium MFC set to  0.000000
6/1/2010	10:27:51 AM	H2 MFC set to  0.000000
6/1/2010	10:27:51 AM	BCl3 MFC set to  0.000000
6/1/2010	10:27:51 AM	PHl3 MFC set to  0.000000
6/1/2010	10:27:51 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:27:51 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:27:51 AM	Tube furnace set to 0
6/1/2010	10:28:39 AM	Helium valve closed
6/1/2010	10:28:39 AM	H2 valve closed
6/1/2010	10:28:39 AM	BCl3 valve closed
6/1/2010	10:28:39 AM	PH3 valve closed
6/1/2010	10:28:39 AM	SiCl4 pre valve closed
6/1/2010	10:28:39 AM	SiCl4 post valve closed
6/1/2010	10:28:39 AM	Bubbler valve closed
6/1/2010	10:28:39 AM	Main Vac valve opened
6/1/2010	10:28:39 AM	Bypass valve opened
6/1/2010	10:28:39 AM	Helium MFC set to  0.000000
6/1/2010	10:28:39 AM	H2 MFC set to  0.000000
6/1/2010	10:28:39 AM	BCl3 MFC set to  0.000000
6/1/2010	10:28:39 AM	PHl3 MFC set to  0.000000
6/1/2010	10:28:39 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:28:39 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:28:39 AM	Tube furnace set to 0
6/1/2010	10:28:39 AM	Run finished at 10:28 AM
6/1/2010	10:28:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	10:34:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	10:34:34 AM	Recipe started at 10:34 AM
6/1/2010	10:34:34 AM	H2 valve closed
6/1/2010	10:34:34 AM	BCl3 valve closed
6/1/2010	10:34:34 AM	PH3 valve closed
6/1/2010	10:34:34 AM	SiCl4 pre valve closed
6/1/2010	10:34:34 AM	SiCl4 post valve closed
6/1/2010	10:34:34 AM	Main Vac valve closed
6/1/2010	10:34:34 AM	Bypass valve closed
6/1/2010	10:34:34 AM	Bubbler valve closed
6/1/2010	10:34:34 AM	Helium valve opened
6/1/2010	10:34:34 AM	Helium MFC set to  500.000000
6/1/2010	10:34:34 AM	H2 MFC set to  0.000000
6/1/2010	10:34:34 AM	BCl3 MFC set to  0.000000
6/1/2010	10:34:34 AM	PHl3 MFC set to  0.000000
6/1/2010	10:34:34 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:34:34 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:34:35 AM	Tube furnace set to 0
6/1/2010	10:35:54 AM	Helium valve closed
6/1/2010	10:35:54 AM	H2 valve closed
6/1/2010	10:35:54 AM	BCl3 valve closed
6/1/2010	10:35:54 AM	PH3 valve closed
6/1/2010	10:35:54 AM	SiCl4 pre valve closed
6/1/2010	10:35:54 AM	SiCl4 post valve closed
6/1/2010	10:35:54 AM	Main Vac valve closed
6/1/2010	10:35:54 AM	Bypass valve closed
6/1/2010	10:35:54 AM	Bubbler valve closed
6/1/2010	10:35:54 AM	Helium MFC set to  0.000000
6/1/2010	10:35:54 AM	H2 MFC set to  0.000000
6/1/2010	10:35:54 AM	BCl3 MFC set to  0.000000
6/1/2010	10:35:54 AM	PHl3 MFC set to  0.000000
6/1/2010	10:35:54 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:35:54 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:35:54 AM	Tube furnace set to 0
6/1/2010	10:36:09 AM	Helium valve closed
6/1/2010	10:36:09 AM	H2 valve closed
6/1/2010	10:36:09 AM	BCl3 valve closed
6/1/2010	10:36:09 AM	PH3 valve closed
6/1/2010	10:36:09 AM	SiCl4 pre valve closed
6/1/2010	10:36:09 AM	SiCl4 post valve closed
6/1/2010	10:36:09 AM	Main Vac valve closed
6/1/2010	10:36:09 AM	Bubbler valve closed
6/1/2010	10:36:09 AM	Bypass valve opened
6/1/2010	10:36:09 AM	Helium MFC set to  0.000000
6/1/2010	10:36:09 AM	H2 MFC set to  0.000000
6/1/2010	10:36:09 AM	BCl3 MFC set to  0.000000
6/1/2010	10:36:09 AM	PHl3 MFC set to  0.000000
6/1/2010	10:36:09 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:36:09 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:36:09 AM	Tube furnace set to 0
6/1/2010	10:36:41 AM	Helium valve closed
6/1/2010	10:36:41 AM	H2 valve closed
6/1/2010	10:36:41 AM	BCl3 valve closed
6/1/2010	10:36:41 AM	PH3 valve closed
6/1/2010	10:36:41 AM	SiCl4 pre valve closed
6/1/2010	10:36:41 AM	SiCl4 post valve closed
6/1/2010	10:36:41 AM	Bubbler valve closed
6/1/2010	10:36:41 AM	Main Vac valve opened
6/1/2010	10:36:41 AM	Bypass valve opened
6/1/2010	10:36:41 AM	Helium MFC set to  0.000000
6/1/2010	10:36:41 AM	H2 MFC set to  0.000000
6/1/2010	10:36:41 AM	BCl3 MFC set to  0.000000
6/1/2010	10:36:41 AM	PHl3 MFC set to  0.000000
6/1/2010	10:36:41 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:36:41 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:36:42 AM	Tube furnace set to 0
6/1/2010	10:41:42 AM	H2 valve closed
6/1/2010	10:41:42 AM	BCl3 valve closed
6/1/2010	10:41:42 AM	PH3 valve closed
6/1/2010	10:41:42 AM	SiCl4 pre valve closed
6/1/2010	10:41:42 AM	SiCl4 post valve closed
6/1/2010	10:41:42 AM	Main Vac valve closed
6/1/2010	10:41:42 AM	Bypass valve closed
6/1/2010	10:41:42 AM	Bubbler valve closed
6/1/2010	10:41:42 AM	Helium valve opened
6/1/2010	10:41:42 AM	Helium MFC set to  500.000000
6/1/2010	10:41:42 AM	H2 MFC set to  0.000000
6/1/2010	10:41:42 AM	BCl3 MFC set to  0.000000
6/1/2010	10:41:42 AM	PHl3 MFC set to  0.000000
6/1/2010	10:41:42 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:41:42 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:41:42 AM	Tube furnace set to 0
6/1/2010	10:43:01 AM	Helium valve closed
6/1/2010	10:43:01 AM	H2 valve closed
6/1/2010	10:43:01 AM	BCl3 valve closed
6/1/2010	10:43:01 AM	PH3 valve closed
6/1/2010	10:43:01 AM	SiCl4 pre valve closed
6/1/2010	10:43:01 AM	SiCl4 post valve closed
6/1/2010	10:43:01 AM	Main Vac valve closed
6/1/2010	10:43:01 AM	Bypass valve closed
6/1/2010	10:43:01 AM	Bubbler valve closed
6/1/2010	10:43:01 AM	Helium MFC set to  0.000000
6/1/2010	10:43:01 AM	H2 MFC set to  0.000000
6/1/2010	10:43:01 AM	BCl3 MFC set to  0.000000
6/1/2010	10:43:01 AM	PHl3 MFC set to  0.000000
6/1/2010	10:43:01 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:43:01 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:43:01 AM	Tube furnace set to 0
6/1/2010	10:43:16 AM	Helium valve closed
6/1/2010	10:43:16 AM	H2 valve closed
6/1/2010	10:43:16 AM	BCl3 valve closed
6/1/2010	10:43:16 AM	PH3 valve closed
6/1/2010	10:43:16 AM	SiCl4 pre valve closed
6/1/2010	10:43:16 AM	SiCl4 post valve closed
6/1/2010	10:43:16 AM	Main Vac valve closed
6/1/2010	10:43:16 AM	Bubbler valve closed
6/1/2010	10:43:16 AM	Bypass valve opened
6/1/2010	10:43:16 AM	Helium MFC set to  0.000000
6/1/2010	10:43:16 AM	H2 MFC set to  0.000000
6/1/2010	10:43:16 AM	BCl3 MFC set to  0.000000
6/1/2010	10:43:16 AM	PHl3 MFC set to  0.000000
6/1/2010	10:43:16 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:43:16 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:43:16 AM	Tube furnace set to 0
6/1/2010	10:43:48 AM	Helium valve closed
6/1/2010	10:43:48 AM	H2 valve closed
6/1/2010	10:43:48 AM	BCl3 valve closed
6/1/2010	10:43:48 AM	PH3 valve closed
6/1/2010	10:43:48 AM	SiCl4 pre valve closed
6/1/2010	10:43:48 AM	SiCl4 post valve closed
6/1/2010	10:43:48 AM	Bubbler valve closed
6/1/2010	10:43:48 AM	Main Vac valve opened
6/1/2010	10:43:48 AM	Bypass valve opened
6/1/2010	10:43:48 AM	Helium MFC set to  0.000000
6/1/2010	10:43:48 AM	H2 MFC set to  0.000000
6/1/2010	10:43:48 AM	BCl3 MFC set to  0.000000
6/1/2010	10:43:49 AM	PHl3 MFC set to  0.000000
6/1/2010	10:43:49 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:43:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:43:49 AM	Tube furnace set to 0
6/1/2010	10:48:49 AM	H2 valve closed
6/1/2010	10:48:49 AM	BCl3 valve closed
6/1/2010	10:48:49 AM	PH3 valve closed
6/1/2010	10:48:49 AM	SiCl4 pre valve closed
6/1/2010	10:48:49 AM	SiCl4 post valve closed
6/1/2010	10:48:49 AM	Main Vac valve closed
6/1/2010	10:48:49 AM	Bypass valve closed
6/1/2010	10:48:49 AM	Bubbler valve closed
6/1/2010	10:48:49 AM	Helium valve opened
6/1/2010	10:48:49 AM	Helium MFC set to  500.000000
6/1/2010	10:48:49 AM	H2 MFC set to  0.000000
6/1/2010	10:48:49 AM	BCl3 MFC set to  0.000000
6/1/2010	10:48:49 AM	PHl3 MFC set to  0.000000
6/1/2010	10:48:49 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:48:49 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:48:49 AM	Tube furnace set to 0
6/1/2010	10:50:08 AM	Helium valve closed
6/1/2010	10:50:08 AM	H2 valve closed
6/1/2010	10:50:08 AM	BCl3 valve closed
6/1/2010	10:50:08 AM	PH3 valve closed
6/1/2010	10:50:08 AM	SiCl4 pre valve closed
6/1/2010	10:50:08 AM	SiCl4 post valve closed
6/1/2010	10:50:08 AM	Main Vac valve closed
6/1/2010	10:50:08 AM	Bypass valve closed
6/1/2010	10:50:08 AM	Bubbler valve closed
6/1/2010	10:50:08 AM	Helium MFC set to  0.000000
6/1/2010	10:50:08 AM	H2 MFC set to  0.000000
6/1/2010	10:50:08 AM	BCl3 MFC set to  0.000000
6/1/2010	10:50:08 AM	PHl3 MFC set to  0.000000
6/1/2010	10:50:08 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:50:08 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:50:08 AM	Tube furnace set to 0
6/1/2010	10:50:23 AM	Helium valve closed
6/1/2010	10:50:23 AM	H2 valve closed
6/1/2010	10:50:23 AM	BCl3 valve closed
6/1/2010	10:50:23 AM	PH3 valve closed
6/1/2010	10:50:23 AM	SiCl4 pre valve closed
6/1/2010	10:50:23 AM	SiCl4 post valve closed
6/1/2010	10:50:23 AM	Main Vac valve closed
6/1/2010	10:50:23 AM	Bubbler valve closed
6/1/2010	10:50:23 AM	Bypass valve opened
6/1/2010	10:50:23 AM	Helium MFC set to  0.000000
6/1/2010	10:50:23 AM	H2 MFC set to  0.000000
6/1/2010	10:50:23 AM	BCl3 MFC set to  0.000000
6/1/2010	10:50:23 AM	PHl3 MFC set to  0.000000
6/1/2010	10:50:23 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:50:23 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:50:23 AM	Tube furnace set to 0
6/1/2010	10:50:55 AM	Helium valve closed
6/1/2010	10:50:55 AM	H2 valve closed
6/1/2010	10:50:55 AM	BCl3 valve closed
6/1/2010	10:50:55 AM	PH3 valve closed
6/1/2010	10:50:55 AM	SiCl4 pre valve closed
6/1/2010	10:50:55 AM	SiCl4 post valve closed
6/1/2010	10:50:55 AM	Bubbler valve closed
6/1/2010	10:50:55 AM	Main Vac valve opened
6/1/2010	10:50:55 AM	Bypass valve opened
6/1/2010	10:50:55 AM	Helium MFC set to  0.000000
6/1/2010	10:50:55 AM	H2 MFC set to  0.000000
6/1/2010	10:50:55 AM	BCl3 MFC set to  0.000000
6/1/2010	10:50:55 AM	PHl3 MFC set to  0.000000
6/1/2010	10:50:55 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:50:55 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:50:55 AM	Tube furnace set to 0
6/1/2010	10:55:55 AM	Helium valve closed
6/1/2010	10:55:55 AM	H2 valve closed
6/1/2010	10:55:55 AM	BCl3 valve closed
6/1/2010	10:55:55 AM	PH3 valve closed
6/1/2010	10:55:55 AM	SiCl4 pre valve closed
6/1/2010	10:55:55 AM	SiCl4 post valve closed
6/1/2010	10:55:55 AM	Bubbler valve closed
6/1/2010	10:55:55 AM	Main Vac valve opened
6/1/2010	10:55:55 AM	Bypass valve opened
6/1/2010	10:55:55 AM	Helium MFC set to  0.000000
6/1/2010	10:55:55 AM	H2 MFC set to  0.000000
6/1/2010	10:55:55 AM	BCl3 MFC set to  0.000000
6/1/2010	10:55:55 AM	PHl3 MFC set to  0.000000
6/1/2010	10:55:55 AM	SiCl4 MFC set to  0.000000
6/1/2010	10:55:55 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	10:55:56 AM	Tube furnace set to 0
6/1/2010	10:55:57 AM	Run finished at 10:55 AM
6/1/2010	10:55:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	11:22:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	11:23:03 AM	Recipe started at 11:23 AM
6/1/2010	11:23:03 AM	H2 valve closed
6/1/2010	11:23:03 AM	BCl3 valve closed
6/1/2010	11:23:03 AM	PH3 valve closed
6/1/2010	11:23:03 AM	SiCl4 pre valve closed
6/1/2010	11:23:03 AM	SiCl4 post valve closed
6/1/2010	11:23:03 AM	Main Vac valve closed
6/1/2010	11:23:03 AM	Bypass valve closed
6/1/2010	11:23:03 AM	Bubbler valve closed
6/1/2010	11:23:03 AM	Helium valve opened
6/1/2010	11:23:03 AM	Helium MFC set to  500.000000
6/1/2010	11:23:03 AM	H2 MFC set to  0.000000
6/1/2010	11:23:03 AM	BCl3 MFC set to  0.000000
6/1/2010	11:23:03 AM	PHl3 MFC set to  0.000000
6/1/2010	11:23:03 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:23:03 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:23:04 AM	Tube furnace set to 0
6/1/2010	11:24:23 AM	Helium valve closed
6/1/2010	11:24:23 AM	H2 valve closed
6/1/2010	11:24:23 AM	BCl3 valve closed
6/1/2010	11:24:23 AM	PH3 valve closed
6/1/2010	11:24:23 AM	SiCl4 pre valve closed
6/1/2010	11:24:23 AM	SiCl4 post valve closed
6/1/2010	11:24:23 AM	Main Vac valve closed
6/1/2010	11:24:23 AM	Bypass valve closed
6/1/2010	11:24:23 AM	Bubbler valve closed
6/1/2010	11:24:23 AM	Helium MFC set to  0.000000
6/1/2010	11:24:23 AM	H2 MFC set to  0.000000
6/1/2010	11:24:23 AM	BCl3 MFC set to  0.000000
6/1/2010	11:24:23 AM	PHl3 MFC set to  0.000000
6/1/2010	11:24:23 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:24:23 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:24:23 AM	Tube furnace set to 0
6/1/2010	11:24:38 AM	Helium valve closed
6/1/2010	11:24:38 AM	H2 valve closed
6/1/2010	11:24:38 AM	BCl3 valve closed
6/1/2010	11:24:38 AM	PH3 valve closed
6/1/2010	11:24:38 AM	SiCl4 pre valve closed
6/1/2010	11:24:38 AM	SiCl4 post valve closed
6/1/2010	11:24:38 AM	Main Vac valve closed
6/1/2010	11:24:38 AM	Bubbler valve closed
6/1/2010	11:24:38 AM	Bypass valve opened
6/1/2010	11:24:38 AM	Helium MFC set to  0.000000
6/1/2010	11:24:38 AM	H2 MFC set to  0.000000
6/1/2010	11:24:38 AM	BCl3 MFC set to  0.000000
6/1/2010	11:24:38 AM	PHl3 MFC set to  0.000000
6/1/2010	11:24:38 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:24:38 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:24:38 AM	Tube furnace set to 0
6/1/2010	11:25:11 AM	Helium valve closed
6/1/2010	11:25:11 AM	H2 valve closed
6/1/2010	11:25:11 AM	BCl3 valve closed
6/1/2010	11:25:11 AM	PH3 valve closed
6/1/2010	11:25:11 AM	SiCl4 pre valve closed
6/1/2010	11:25:11 AM	SiCl4 post valve closed
6/1/2010	11:25:11 AM	Bubbler valve closed
6/1/2010	11:25:11 AM	Main Vac valve opened
6/1/2010	11:25:11 AM	Bypass valve opened
6/1/2010	11:25:11 AM	Helium MFC set to  0.000000
6/1/2010	11:25:11 AM	H2 MFC set to  0.000000
6/1/2010	11:25:11 AM	BCl3 MFC set to  0.000000
6/1/2010	11:25:11 AM	PHl3 MFC set to  0.000000
6/1/2010	11:25:11 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:25:11 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:25:11 AM	Tube furnace set to 0
6/1/2010	11:30:11 AM	H2 valve closed
6/1/2010	11:30:11 AM	BCl3 valve closed
6/1/2010	11:30:11 AM	PH3 valve closed
6/1/2010	11:30:11 AM	SiCl4 pre valve closed
6/1/2010	11:30:11 AM	SiCl4 post valve closed
6/1/2010	11:30:11 AM	Main Vac valve closed
6/1/2010	11:30:11 AM	Bypass valve closed
6/1/2010	11:30:11 AM	Bubbler valve closed
6/1/2010	11:30:11 AM	Helium valve opened
6/1/2010	11:30:11 AM	Helium MFC set to  500.000000
6/1/2010	11:30:11 AM	H2 MFC set to  0.000000
6/1/2010	11:30:11 AM	BCl3 MFC set to  0.000000
6/1/2010	11:30:11 AM	PHl3 MFC set to  0.000000
6/1/2010	11:30:11 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:30:11 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:30:11 AM	Tube furnace set to 0
6/1/2010	11:31:31 AM	Helium valve closed
6/1/2010	11:31:31 AM	H2 valve closed
6/1/2010	11:31:31 AM	BCl3 valve closed
6/1/2010	11:31:31 AM	PH3 valve closed
6/1/2010	11:31:31 AM	SiCl4 pre valve closed
6/1/2010	11:31:31 AM	SiCl4 post valve closed
6/1/2010	11:31:31 AM	Main Vac valve closed
6/1/2010	11:31:31 AM	Bypass valve closed
6/1/2010	11:31:31 AM	Bubbler valve closed
6/1/2010	11:31:31 AM	Helium MFC set to  0.000000
6/1/2010	11:31:31 AM	H2 MFC set to  0.000000
6/1/2010	11:31:31 AM	BCl3 MFC set to  0.000000
6/1/2010	11:31:31 AM	PHl3 MFC set to  0.000000
6/1/2010	11:31:31 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:31:31 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:31:31 AM	Tube furnace set to 0
6/1/2010	11:31:46 AM	Helium valve closed
6/1/2010	11:31:46 AM	H2 valve closed
6/1/2010	11:31:46 AM	BCl3 valve closed
6/1/2010	11:31:46 AM	PH3 valve closed
6/1/2010	11:31:46 AM	SiCl4 pre valve closed
6/1/2010	11:31:46 AM	SiCl4 post valve closed
6/1/2010	11:31:46 AM	Main Vac valve closed
6/1/2010	11:31:46 AM	Bubbler valve closed
6/1/2010	11:31:46 AM	Bypass valve opened
6/1/2010	11:31:46 AM	Helium MFC set to  0.000000
6/1/2010	11:31:46 AM	H2 MFC set to  0.000000
6/1/2010	11:31:46 AM	BCl3 MFC set to  0.000000
6/1/2010	11:31:46 AM	PHl3 MFC set to  0.000000
6/1/2010	11:31:46 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:31:46 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:31:46 AM	Tube furnace set to 0
6/1/2010	11:32:18 AM	Helium valve closed
6/1/2010	11:32:18 AM	H2 valve closed
6/1/2010	11:32:18 AM	BCl3 valve closed
6/1/2010	11:32:18 AM	PH3 valve closed
6/1/2010	11:32:18 AM	SiCl4 pre valve closed
6/1/2010	11:32:18 AM	SiCl4 post valve closed
6/1/2010	11:32:18 AM	Bubbler valve closed
6/1/2010	11:32:18 AM	Main Vac valve opened
6/1/2010	11:32:18 AM	Bypass valve opened
6/1/2010	11:32:18 AM	Helium MFC set to  0.000000
6/1/2010	11:32:18 AM	H2 MFC set to  0.000000
6/1/2010	11:32:18 AM	BCl3 MFC set to  0.000000
6/1/2010	11:32:18 AM	PHl3 MFC set to  0.000000
6/1/2010	11:32:18 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:32:18 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:32:18 AM	Tube furnace set to 0
6/1/2010	11:37:18 AM	H2 valve closed
6/1/2010	11:37:18 AM	BCl3 valve closed
6/1/2010	11:37:18 AM	PH3 valve closed
6/1/2010	11:37:18 AM	SiCl4 pre valve closed
6/1/2010	11:37:18 AM	SiCl4 post valve closed
6/1/2010	11:37:18 AM	Main Vac valve closed
6/1/2010	11:37:18 AM	Bypass valve closed
6/1/2010	11:37:18 AM	Bubbler valve closed
6/1/2010	11:37:18 AM	Helium valve opened
6/1/2010	11:37:18 AM	Helium MFC set to  500.000000
6/1/2010	11:37:18 AM	H2 MFC set to  0.000000
6/1/2010	11:37:18 AM	BCl3 MFC set to  0.000000
6/1/2010	11:37:18 AM	PHl3 MFC set to  0.000000
6/1/2010	11:37:18 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:37:18 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:37:19 AM	Tube furnace set to 0
6/1/2010	11:38:38 AM	Helium valve closed
6/1/2010	11:38:38 AM	H2 valve closed
6/1/2010	11:38:38 AM	BCl3 valve closed
6/1/2010	11:38:38 AM	PH3 valve closed
6/1/2010	11:38:38 AM	SiCl4 pre valve closed
6/1/2010	11:38:38 AM	SiCl4 post valve closed
6/1/2010	11:38:38 AM	Main Vac valve closed
6/1/2010	11:38:38 AM	Bypass valve closed
6/1/2010	11:38:38 AM	Bubbler valve closed
6/1/2010	11:38:38 AM	Helium MFC set to  0.000000
6/1/2010	11:38:38 AM	H2 MFC set to  0.000000
6/1/2010	11:38:38 AM	BCl3 MFC set to  0.000000
6/1/2010	11:38:38 AM	PHl3 MFC set to  0.000000
6/1/2010	11:38:38 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:38:38 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:38:39 AM	Tube furnace set to 0
6/1/2010	11:38:54 AM	Helium valve closed
6/1/2010	11:38:54 AM	H2 valve closed
6/1/2010	11:38:54 AM	BCl3 valve closed
6/1/2010	11:38:54 AM	PH3 valve closed
6/1/2010	11:38:54 AM	SiCl4 pre valve closed
6/1/2010	11:38:54 AM	SiCl4 post valve closed
6/1/2010	11:38:54 AM	Main Vac valve closed
6/1/2010	11:38:54 AM	Bubbler valve closed
6/1/2010	11:38:54 AM	Bypass valve opened
6/1/2010	11:38:54 AM	Helium MFC set to  0.000000
6/1/2010	11:38:54 AM	H2 MFC set to  0.000000
6/1/2010	11:38:54 AM	BCl3 MFC set to  0.000000
6/1/2010	11:38:54 AM	PHl3 MFC set to  0.000000
6/1/2010	11:38:54 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:38:54 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:38:54 AM	Tube furnace set to 0
6/1/2010	11:39:26 AM	Helium valve closed
6/1/2010	11:39:26 AM	H2 valve closed
6/1/2010	11:39:26 AM	BCl3 valve closed
6/1/2010	11:39:26 AM	PH3 valve closed
6/1/2010	11:39:26 AM	SiCl4 pre valve closed
6/1/2010	11:39:26 AM	SiCl4 post valve closed
6/1/2010	11:39:26 AM	Bubbler valve closed
6/1/2010	11:39:26 AM	Main Vac valve opened
6/1/2010	11:39:26 AM	Bypass valve opened
6/1/2010	11:39:26 AM	Helium MFC set to  0.000000
6/1/2010	11:39:26 AM	H2 MFC set to  0.000000
6/1/2010	11:39:26 AM	BCl3 MFC set to  0.000000
6/1/2010	11:39:26 AM	PHl3 MFC set to  0.000000
6/1/2010	11:39:26 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:39:26 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:39:26 AM	Tube furnace set to 0
6/1/2010	11:44:26 AM	Helium valve closed
6/1/2010	11:44:26 AM	H2 valve closed
6/1/2010	11:44:26 AM	BCl3 valve closed
6/1/2010	11:44:26 AM	PH3 valve closed
6/1/2010	11:44:26 AM	SiCl4 pre valve closed
6/1/2010	11:44:26 AM	SiCl4 post valve closed
6/1/2010	11:44:26 AM	Bubbler valve closed
6/1/2010	11:44:26 AM	Main Vac valve opened
6/1/2010	11:44:26 AM	Bypass valve opened
6/1/2010	11:44:26 AM	Helium MFC set to  0.000000
6/1/2010	11:44:26 AM	H2 MFC set to  0.000000
6/1/2010	11:44:26 AM	BCl3 MFC set to  0.000000
6/1/2010	11:44:26 AM	PHl3 MFC set to  0.000000
6/1/2010	11:44:26 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:44:26 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:44:26 AM	Tube furnace set to 0
6/1/2010	11:44:27 AM	Run finished at 11:44 AM
6/1/2010	11:44:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	11:45:29 AM	Recipe started at 11:45 AM
6/1/2010	11:45:29 AM	Helium valve closed
6/1/2010	11:45:29 AM	BCl3 valve closed
6/1/2010	11:45:29 AM	PH3 valve closed
6/1/2010	11:45:29 AM	SiCl4 pre valve closed
6/1/2010	11:45:29 AM	SiCl4 post valve closed
6/1/2010	11:45:29 AM	Main Vac valve closed
6/1/2010	11:45:29 AM	Bypass valve closed
6/1/2010	11:45:29 AM	Bubbler valve closed
6/1/2010	11:45:29 AM	H2 valve opened
6/1/2010	11:45:29 AM	Helium MFC set to  0.000000
6/1/2010	11:45:29 AM	H2 MFC set to  500.000000
6/1/2010	11:45:29 AM	BCl3 MFC set to  0.000000
6/1/2010	11:45:29 AM	PHl3 MFC set to  0.000000
6/1/2010	11:45:29 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:45:29 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:45:29 AM	Tube furnace set to 0
6/1/2010	11:46:50 AM	Helium valve closed
6/1/2010	11:46:50 AM	BCl3 valve closed
6/1/2010	11:46:50 AM	PH3 valve closed
6/1/2010	11:46:50 AM	SiCl4 pre valve closed
6/1/2010	11:46:50 AM	SiCl4 post valve closed
6/1/2010	11:46:50 AM	Main Vac valve closed
6/1/2010	11:46:50 AM	Bypass valve closed
6/1/2010	11:46:50 AM	H2 valve opened
6/1/2010	11:46:50 AM	Bubbler valve opened
6/1/2010	11:46:50 AM	Helium MFC set to  0.000000
6/1/2010	11:46:50 AM	H2 MFC set to  500.000000
6/1/2010	11:46:50 AM	BCl3 MFC set to  0.000000
6/1/2010	11:46:50 AM	PHl3 MFC set to  0.000000
6/1/2010	11:46:50 AM	SiCl4 MFC set to  0.000000
6/1/2010	11:46:50 AM	Bypass solenoid MFC set to  0.000000
6/1/2010	11:46:50 AM	Tube furnace set to 1000
6/1/2010	12:06:50 PM	Helium valve closed
6/1/2010	12:06:50 PM	PH3 valve closed
6/1/2010	12:06:50 PM	Main Vac valve closed
6/1/2010	12:06:50 PM	Bypass valve closed
6/1/2010	12:06:50 PM	H2 valve opened
6/1/2010	12:06:50 PM	BCl3 valve opened
6/1/2010	12:06:50 PM	SiCl4 pre valve opened
6/1/2010	12:06:50 PM	SiCl4 post valve opened
6/1/2010	12:06:50 PM	Bubbler valve opened
6/1/2010	12:06:50 PM	Helium MFC set to  0.000000
6/1/2010	12:06:50 PM	H2 MFC set to  500.000000
6/1/2010	12:06:50 PM	BCl3 MFC set to  35.000000
6/1/2010	12:06:50 PM	PHl3 MFC set to  0.000000
6/1/2010	12:06:50 PM	SiCl4 MFC set to  50.000000
6/1/2010	12:06:50 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	12:06:50 PM	Tube furnace set to 1000
6/1/2010	12:18:50 PM	H2 valve closed
6/1/2010	12:18:50 PM	BCl3 valve closed
6/1/2010	12:18:50 PM	PH3 valve closed
6/1/2010	12:18:50 PM	SiCl4 pre valve closed
6/1/2010	12:18:50 PM	SiCl4 post valve closed
6/1/2010	12:18:50 PM	Main Vac valve closed
6/1/2010	12:18:50 PM	Bypass valve closed
6/1/2010	12:18:50 PM	Helium valve opened
6/1/2010	12:18:50 PM	Bubbler valve opened
6/1/2010	12:18:50 PM	Helium MFC set to  500.000000
6/1/2010	12:18:50 PM	H2 MFC set to  0.000000
6/1/2010	12:18:50 PM	BCl3 MFC set to  0.000000
6/1/2010	12:18:50 PM	PHl3 MFC set to  0.000000
6/1/2010	12:18:50 PM	SiCl4 MFC set to  0.000000
6/1/2010	12:18:50 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	12:18:50 PM	Tube furnace set to 0
6/1/2010	12:38:50 PM	Helium valve closed
6/1/2010	12:38:50 PM	H2 valve closed
6/1/2010	12:38:50 PM	BCl3 valve closed
6/1/2010	12:38:50 PM	PH3 valve closed
6/1/2010	12:38:50 PM	SiCl4 pre valve closed
6/1/2010	12:38:50 PM	SiCl4 post valve closed
6/1/2010	12:38:50 PM	Main Vac valve closed
6/1/2010	12:38:50 PM	Bypass valve closed
6/1/2010	12:38:50 PM	Bubbler valve closed
6/1/2010	12:38:50 PM	Helium MFC set to  0.000000
6/1/2010	12:38:50 PM	H2 MFC set to  0.000000
6/1/2010	12:38:50 PM	BCl3 MFC set to  0.000000
6/1/2010	12:38:50 PM	PHl3 MFC set to  0.000000
6/1/2010	12:38:50 PM	SiCl4 MFC set to  0.000000
6/1/2010	12:38:50 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	12:38:50 PM	Tube furnace set to 0
6/1/2010	12:38:51 PM	Run finished at 12:38 PM
6/1/2010	1:41:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	1:41:38 PM	Recipe started at 1:41 PM
6/1/2010	1:41:38 PM	Helium valve closed
6/1/2010	1:41:38 PM	H2 valve closed
6/1/2010	1:41:38 PM	BCl3 valve closed
6/1/2010	1:41:38 PM	PH3 valve closed
6/1/2010	1:41:38 PM	SiCl4 pre valve closed
6/1/2010	1:41:38 PM	SiCl4 post valve closed
6/1/2010	1:41:38 PM	Main Vac valve closed
6/1/2010	1:41:38 PM	Bubbler valve closed
6/1/2010	1:41:38 PM	Bypass valve opened
6/1/2010	1:41:38 PM	Helium MFC set to  0.000000
6/1/2010	1:41:38 PM	H2 MFC set to  0.000000
6/1/2010	1:41:38 PM	BCl3 MFC set to  0.000000
6/1/2010	1:41:38 PM	PHl3 MFC set to  0.000000
6/1/2010	1:41:38 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:41:38 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:41:38 PM	Tube furnace set to 0
6/1/2010	1:42:26 PM	Helium valve closed
6/1/2010	1:42:26 PM	H2 valve closed
6/1/2010	1:42:26 PM	BCl3 valve closed
6/1/2010	1:42:26 PM	PH3 valve closed
6/1/2010	1:42:26 PM	SiCl4 pre valve closed
6/1/2010	1:42:26 PM	SiCl4 post valve closed
6/1/2010	1:42:26 PM	Bubbler valve closed
6/1/2010	1:42:26 PM	Main Vac valve opened
6/1/2010	1:42:26 PM	Bypass valve opened
6/1/2010	1:42:26 PM	Helium MFC set to  0.000000
6/1/2010	1:42:26 PM	H2 MFC set to  0.000000
6/1/2010	1:42:26 PM	BCl3 MFC set to  0.000000
6/1/2010	1:42:26 PM	PHl3 MFC set to  0.000000
6/1/2010	1:42:26 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:42:26 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:42:26 PM	Tube furnace set to 0
6/1/2010	1:42:26 PM	Run finished at 1:42 PM
6/1/2010	1:42:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	1:43:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2010	1:43:03 PM	Recipe started at 1:43 PM
6/1/2010	1:43:03 PM	H2 valve closed
6/1/2010	1:43:03 PM	BCl3 valve closed
6/1/2010	1:43:03 PM	PH3 valve closed
6/1/2010	1:43:03 PM	SiCl4 pre valve closed
6/1/2010	1:43:03 PM	SiCl4 post valve closed
6/1/2010	1:43:03 PM	Main Vac valve closed
6/1/2010	1:43:03 PM	Bypass valve closed
6/1/2010	1:43:03 PM	Bubbler valve closed
6/1/2010	1:43:03 PM	Helium valve opened
6/1/2010	1:43:04 PM	Helium MFC set to  500.000000
6/1/2010	1:43:04 PM	H2 MFC set to  0.000000
6/1/2010	1:43:04 PM	BCl3 MFC set to  0.000000
6/1/2010	1:43:04 PM	PHl3 MFC set to  0.000000
6/1/2010	1:43:04 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:43:04 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:43:04 PM	Tube furnace set to 0
6/1/2010	1:44:21 PM	Helium valve closed
6/1/2010	1:44:21 PM	H2 valve closed
6/1/2010	1:44:21 PM	BCl3 valve closed
6/1/2010	1:44:21 PM	PH3 valve closed
6/1/2010	1:44:21 PM	SiCl4 pre valve closed
6/1/2010	1:44:21 PM	SiCl4 post valve closed
6/1/2010	1:44:21 PM	Main Vac valve closed
6/1/2010	1:44:21 PM	Bypass valve closed
6/1/2010	1:44:21 PM	Bubbler valve closed
6/1/2010	1:44:21 PM	Helium MFC set to  0.000000
6/1/2010	1:44:21 PM	H2 MFC set to  0.000000
6/1/2010	1:44:21 PM	BCl3 MFC set to  0.000000
6/1/2010	1:44:21 PM	PHl3 MFC set to  0.000000
6/1/2010	1:44:21 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:44:21 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:44:21 PM	Tube furnace set to 0
6/1/2010	1:44:21 PM	Run finished at 1:44 PM
6/1/2010	1:44:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2010	1:44:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	1:44:52 PM	Recipe started at 1:44 PM
6/1/2010	1:44:52 PM	Helium valve closed
6/1/2010	1:44:52 PM	H2 valve closed
6/1/2010	1:44:52 PM	BCl3 valve closed
6/1/2010	1:44:52 PM	PH3 valve closed
6/1/2010	1:44:52 PM	SiCl4 pre valve closed
6/1/2010	1:44:52 PM	SiCl4 post valve closed
6/1/2010	1:44:52 PM	Main Vac valve closed
6/1/2010	1:44:52 PM	Bubbler valve closed
6/1/2010	1:44:52 PM	Bypass valve opened
6/1/2010	1:44:52 PM	Helium MFC set to  0.000000
6/1/2010	1:44:52 PM	H2 MFC set to  0.000000
6/1/2010	1:44:52 PM	BCl3 MFC set to  0.000000
6/1/2010	1:44:52 PM	PHl3 MFC set to  0.000000
6/1/2010	1:44:52 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:44:52 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:44:52 PM	Tube furnace set to 0
6/1/2010	1:45:25 PM	Helium valve closed
6/1/2010	1:45:25 PM	H2 valve closed
6/1/2010	1:45:25 PM	BCl3 valve closed
6/1/2010	1:45:25 PM	PH3 valve closed
6/1/2010	1:45:25 PM	SiCl4 pre valve closed
6/1/2010	1:45:25 PM	SiCl4 post valve closed
6/1/2010	1:45:25 PM	Bubbler valve closed
6/1/2010	1:45:25 PM	Main Vac valve opened
6/1/2010	1:45:25 PM	Bypass valve opened
6/1/2010	1:45:25 PM	Helium MFC set to  0.000000
6/1/2010	1:45:25 PM	H2 MFC set to  0.000000
6/1/2010	1:45:25 PM	BCl3 MFC set to  0.000000
6/1/2010	1:45:25 PM	PHl3 MFC set to  0.000000
6/1/2010	1:45:25 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:45:25 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:45:25 PM	Tube furnace set to 0
6/1/2010	1:45:26 PM	Run finished at 1:45 PM
6/1/2010	1:45:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	1:48:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	1:48:16 PM	Recipe started at 1:48 PM
6/1/2010	1:48:16 PM	H2 valve closed
6/1/2010	1:48:16 PM	BCl3 valve closed
6/1/2010	1:48:16 PM	PH3 valve closed
6/1/2010	1:48:16 PM	SiCl4 pre valve closed
6/1/2010	1:48:16 PM	SiCl4 post valve closed
6/1/2010	1:48:16 PM	Main Vac valve closed
6/1/2010	1:48:16 PM	Bypass valve closed
6/1/2010	1:48:16 PM	Bubbler valve closed
6/1/2010	1:48:16 PM	Helium valve opened
6/1/2010	1:48:16 PM	Helium MFC set to  500.000000
6/1/2010	1:48:16 PM	H2 MFC set to  0.000000
6/1/2010	1:48:16 PM	BCl3 MFC set to  0.000000
6/1/2010	1:48:16 PM	PHl3 MFC set to  0.000000
6/1/2010	1:48:16 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:48:16 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:48:17 PM	Tube furnace set to 0
6/1/2010	1:49:35 PM	Helium valve closed
6/1/2010	1:49:35 PM	H2 valve closed
6/1/2010	1:49:35 PM	BCl3 valve closed
6/1/2010	1:49:35 PM	PH3 valve closed
6/1/2010	1:49:35 PM	SiCl4 pre valve closed
6/1/2010	1:49:35 PM	SiCl4 post valve closed
6/1/2010	1:49:35 PM	Main Vac valve closed
6/1/2010	1:49:35 PM	Bypass valve closed
6/1/2010	1:49:35 PM	Bubbler valve closed
6/1/2010	1:49:35 PM	Helium MFC set to  0.000000
6/1/2010	1:49:35 PM	H2 MFC set to  0.000000
6/1/2010	1:49:35 PM	BCl3 MFC set to  0.000000
6/1/2010	1:49:35 PM	PHl3 MFC set to  0.000000
6/1/2010	1:49:35 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:49:35 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:49:35 PM	Tube furnace set to 0
6/1/2010	1:49:51 PM	Helium valve closed
6/1/2010	1:49:51 PM	H2 valve closed
6/1/2010	1:49:51 PM	BCl3 valve closed
6/1/2010	1:49:51 PM	PH3 valve closed
6/1/2010	1:49:51 PM	SiCl4 pre valve closed
6/1/2010	1:49:51 PM	SiCl4 post valve closed
6/1/2010	1:49:51 PM	Main Vac valve closed
6/1/2010	1:49:51 PM	Bubbler valve closed
6/1/2010	1:49:51 PM	Bypass valve opened
6/1/2010	1:49:51 PM	Helium MFC set to  0.000000
6/1/2010	1:49:51 PM	H2 MFC set to  0.000000
6/1/2010	1:49:51 PM	BCl3 MFC set to  0.000000
6/1/2010	1:49:51 PM	PHl3 MFC set to  0.000000
6/1/2010	1:49:51 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:49:51 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:49:51 PM	Tube furnace set to 0
6/1/2010	1:50:23 PM	Helium valve closed
6/1/2010	1:50:23 PM	H2 valve closed
6/1/2010	1:50:23 PM	BCl3 valve closed
6/1/2010	1:50:23 PM	PH3 valve closed
6/1/2010	1:50:23 PM	SiCl4 pre valve closed
6/1/2010	1:50:23 PM	SiCl4 post valve closed
6/1/2010	1:50:23 PM	Bubbler valve closed
6/1/2010	1:50:23 PM	Main Vac valve opened
6/1/2010	1:50:23 PM	Bypass valve opened
6/1/2010	1:50:23 PM	Helium MFC set to  0.000000
6/1/2010	1:50:23 PM	H2 MFC set to  0.000000
6/1/2010	1:50:23 PM	BCl3 MFC set to  0.000000
6/1/2010	1:50:23 PM	PHl3 MFC set to  0.000000
6/1/2010	1:50:23 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:50:23 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:50:23 PM	Tube furnace set to 0
6/1/2010	1:55:23 PM	H2 valve closed
6/1/2010	1:55:23 PM	BCl3 valve closed
6/1/2010	1:55:23 PM	PH3 valve closed
6/1/2010	1:55:23 PM	SiCl4 pre valve closed
6/1/2010	1:55:23 PM	SiCl4 post valve closed
6/1/2010	1:55:23 PM	Main Vac valve closed
6/1/2010	1:55:23 PM	Bypass valve closed
6/1/2010	1:55:23 PM	Bubbler valve closed
6/1/2010	1:55:23 PM	Helium valve opened
6/1/2010	1:55:23 PM	Helium MFC set to  500.000000
6/1/2010	1:55:23 PM	H2 MFC set to  0.000000
6/1/2010	1:55:23 PM	BCl3 MFC set to  0.000000
6/1/2010	1:55:23 PM	PHl3 MFC set to  0.000000
6/1/2010	1:55:23 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:55:23 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:55:23 PM	Tube furnace set to 0
6/1/2010	1:56:42 PM	Helium valve closed
6/1/2010	1:56:42 PM	H2 valve closed
6/1/2010	1:56:42 PM	BCl3 valve closed
6/1/2010	1:56:42 PM	PH3 valve closed
6/1/2010	1:56:42 PM	SiCl4 pre valve closed
6/1/2010	1:56:42 PM	SiCl4 post valve closed
6/1/2010	1:56:42 PM	Main Vac valve closed
6/1/2010	1:56:42 PM	Bypass valve closed
6/1/2010	1:56:42 PM	Bubbler valve closed
6/1/2010	1:56:42 PM	Helium MFC set to  0.000000
6/1/2010	1:56:42 PM	H2 MFC set to  0.000000
6/1/2010	1:56:42 PM	BCl3 MFC set to  0.000000
6/1/2010	1:56:42 PM	PHl3 MFC set to  0.000000
6/1/2010	1:56:42 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:56:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:56:42 PM	Tube furnace set to 0
6/1/2010	1:56:57 PM	Helium valve closed
6/1/2010	1:56:57 PM	H2 valve closed
6/1/2010	1:56:57 PM	BCl3 valve closed
6/1/2010	1:56:57 PM	PH3 valve closed
6/1/2010	1:56:57 PM	SiCl4 pre valve closed
6/1/2010	1:56:57 PM	SiCl4 post valve closed
6/1/2010	1:56:57 PM	Main Vac valve closed
6/1/2010	1:56:57 PM	Bubbler valve closed
6/1/2010	1:56:57 PM	Bypass valve opened
6/1/2010	1:56:57 PM	Helium MFC set to  0.000000
6/1/2010	1:56:57 PM	H2 MFC set to  0.000000
6/1/2010	1:56:57 PM	BCl3 MFC set to  0.000000
6/1/2010	1:56:57 PM	PHl3 MFC set to  0.000000
6/1/2010	1:56:57 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:56:57 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:56:57 PM	Tube furnace set to 0
6/1/2010	1:57:29 PM	Helium valve closed
6/1/2010	1:57:29 PM	H2 valve closed
6/1/2010	1:57:29 PM	BCl3 valve closed
6/1/2010	1:57:29 PM	PH3 valve closed
6/1/2010	1:57:29 PM	SiCl4 pre valve closed
6/1/2010	1:57:29 PM	SiCl4 post valve closed
6/1/2010	1:57:29 PM	Bubbler valve closed
6/1/2010	1:57:29 PM	Main Vac valve opened
6/1/2010	1:57:29 PM	Bypass valve opened
6/1/2010	1:57:29 PM	Helium MFC set to  0.000000
6/1/2010	1:57:29 PM	H2 MFC set to  0.000000
6/1/2010	1:57:29 PM	BCl3 MFC set to  0.000000
6/1/2010	1:57:29 PM	PHl3 MFC set to  0.000000
6/1/2010	1:57:29 PM	SiCl4 MFC set to  0.000000
6/1/2010	1:57:29 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	1:57:29 PM	Tube furnace set to 0
6/1/2010	2:02:29 PM	H2 valve closed
6/1/2010	2:02:29 PM	BCl3 valve closed
6/1/2010	2:02:29 PM	PH3 valve closed
6/1/2010	2:02:29 PM	SiCl4 pre valve closed
6/1/2010	2:02:29 PM	SiCl4 post valve closed
6/1/2010	2:02:29 PM	Main Vac valve closed
6/1/2010	2:02:29 PM	Bypass valve closed
6/1/2010	2:02:29 PM	Bubbler valve closed
6/1/2010	2:02:29 PM	Helium valve opened
6/1/2010	2:02:29 PM	Helium MFC set to  500.000000
6/1/2010	2:02:29 PM	H2 MFC set to  0.000000
6/1/2010	2:02:29 PM	BCl3 MFC set to  0.000000
6/1/2010	2:02:29 PM	PHl3 MFC set to  0.000000
6/1/2010	2:02:29 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:02:29 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:02:30 PM	Tube furnace set to 0
6/1/2010	2:03:48 PM	Helium valve closed
6/1/2010	2:03:48 PM	H2 valve closed
6/1/2010	2:03:48 PM	BCl3 valve closed
6/1/2010	2:03:48 PM	PH3 valve closed
6/1/2010	2:03:48 PM	SiCl4 pre valve closed
6/1/2010	2:03:48 PM	SiCl4 post valve closed
6/1/2010	2:03:48 PM	Main Vac valve closed
6/1/2010	2:03:48 PM	Bypass valve closed
6/1/2010	2:03:48 PM	Bubbler valve closed
6/1/2010	2:03:48 PM	Helium MFC set to  0.000000
6/1/2010	2:03:48 PM	H2 MFC set to  0.000000
6/1/2010	2:03:48 PM	BCl3 MFC set to  0.000000
6/1/2010	2:03:48 PM	PHl3 MFC set to  0.000000
6/1/2010	2:03:48 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:03:48 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:03:48 PM	Tube furnace set to 0
6/1/2010	2:04:03 PM	Helium valve closed
6/1/2010	2:04:03 PM	H2 valve closed
6/1/2010	2:04:03 PM	BCl3 valve closed
6/1/2010	2:04:03 PM	PH3 valve closed
6/1/2010	2:04:03 PM	SiCl4 pre valve closed
6/1/2010	2:04:03 PM	SiCl4 post valve closed
6/1/2010	2:04:03 PM	Main Vac valve closed
6/1/2010	2:04:03 PM	Bubbler valve closed
6/1/2010	2:04:03 PM	Bypass valve opened
6/1/2010	2:04:03 PM	Helium MFC set to  0.000000
6/1/2010	2:04:03 PM	H2 MFC set to  0.000000
6/1/2010	2:04:03 PM	BCl3 MFC set to  0.000000
6/1/2010	2:04:03 PM	PHl3 MFC set to  0.000000
6/1/2010	2:04:03 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:04:03 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:04:03 PM	Tube furnace set to 0
6/1/2010	2:04:35 PM	Helium valve closed
6/1/2010	2:04:35 PM	H2 valve closed
6/1/2010	2:04:35 PM	BCl3 valve closed
6/1/2010	2:04:35 PM	PH3 valve closed
6/1/2010	2:04:35 PM	SiCl4 pre valve closed
6/1/2010	2:04:35 PM	SiCl4 post valve closed
6/1/2010	2:04:35 PM	Bubbler valve closed
6/1/2010	2:04:35 PM	Main Vac valve opened
6/1/2010	2:04:35 PM	Bypass valve opened
6/1/2010	2:04:35 PM	Helium MFC set to  0.000000
6/1/2010	2:04:35 PM	H2 MFC set to  0.000000
6/1/2010	2:04:35 PM	BCl3 MFC set to  0.000000
6/1/2010	2:04:35 PM	PHl3 MFC set to  0.000000
6/1/2010	2:04:35 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:04:35 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:04:36 PM	Tube furnace set to 0
6/1/2010	2:09:36 PM	Helium valve closed
6/1/2010	2:09:36 PM	H2 valve closed
6/1/2010	2:09:36 PM	BCl3 valve closed
6/1/2010	2:09:36 PM	PH3 valve closed
6/1/2010	2:09:36 PM	SiCl4 pre valve closed
6/1/2010	2:09:36 PM	SiCl4 post valve closed
6/1/2010	2:09:36 PM	Bubbler valve closed
6/1/2010	2:09:36 PM	Main Vac valve opened
6/1/2010	2:09:36 PM	Bypass valve opened
6/1/2010	2:09:36 PM	Helium MFC set to  0.000000
6/1/2010	2:09:36 PM	H2 MFC set to  0.000000
6/1/2010	2:09:36 PM	BCl3 MFC set to  0.000000
6/1/2010	2:09:36 PM	PHl3 MFC set to  0.000000
6/1/2010	2:09:36 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:09:36 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:09:36 PM	Tube furnace set to 0
6/1/2010	2:09:37 PM	Run finished at 2:09 PM
6/1/2010	2:09:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	2:40:26 PM	Bypass valve closed
6/1/2010	2:40:26 PM	Main Vac valve closed
6/1/2010	2:40:50 PM	Bypass valve opened
6/1/2010	2:40:50 PM	Main Vac valve opened
6/1/2010	2:41:56 PM	Recipe started at 2:41 PM
6/1/2010	2:41:56 PM	Helium valve closed
6/1/2010	2:41:56 PM	BCl3 valve closed
6/1/2010	2:41:56 PM	PH3 valve closed
6/1/2010	2:41:56 PM	SiCl4 pre valve closed
6/1/2010	2:41:56 PM	SiCl4 post valve closed
6/1/2010	2:41:56 PM	Main Vac valve closed
6/1/2010	2:41:56 PM	Bypass valve closed
6/1/2010	2:41:56 PM	Bubbler valve closed
6/1/2010	2:41:56 PM	H2 valve opened
6/1/2010	2:41:56 PM	Helium MFC set to  0.000000
6/1/2010	2:41:56 PM	H2 MFC set to  500.000000
6/1/2010	2:41:56 PM	BCl3 MFC set to  0.000000
6/1/2010	2:41:56 PM	PHl3 MFC set to  0.000000
6/1/2010	2:41:56 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:41:56 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:41:57 PM	Tube furnace set to 0
6/1/2010	2:43:17 PM	Helium valve closed
6/1/2010	2:43:17 PM	BCl3 valve closed
6/1/2010	2:43:17 PM	PH3 valve closed
6/1/2010	2:43:17 PM	SiCl4 pre valve closed
6/1/2010	2:43:17 PM	SiCl4 post valve closed
6/1/2010	2:43:17 PM	Main Vac valve closed
6/1/2010	2:43:17 PM	Bypass valve closed
6/1/2010	2:43:17 PM	H2 valve opened
6/1/2010	2:43:17 PM	Bubbler valve opened
6/1/2010	2:43:17 PM	Helium MFC set to  0.000000
6/1/2010	2:43:17 PM	H2 MFC set to  500.000000
6/1/2010	2:43:17 PM	BCl3 MFC set to  0.000000
6/1/2010	2:43:17 PM	PHl3 MFC set to  0.000000
6/1/2010	2:43:17 PM	SiCl4 MFC set to  0.000000
6/1/2010	2:43:17 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:43:17 PM	Tube furnace set to 1000
6/1/2010	2:52:03 PM	Helium valve closed
6/1/2010	2:52:03 PM	PH3 valve closed
6/1/2010	2:52:03 PM	Main Vac valve closed
6/1/2010	2:52:03 PM	Bypass valve closed
6/1/2010	2:52:03 PM	H2 valve opened
6/1/2010	2:52:03 PM	BCl3 valve opened
6/1/2010	2:52:03 PM	SiCl4 pre valve opened
6/1/2010	2:52:03 PM	SiCl4 post valve opened
6/1/2010	2:52:03 PM	Bubbler valve opened
6/1/2010	2:52:03 PM	Helium MFC set to  0.000000
6/1/2010	2:52:03 PM	H2 MFC set to  500.000000
6/1/2010	2:52:03 PM	BCl3 MFC set to  35.000000
6/1/2010	2:52:03 PM	PHl3 MFC set to  0.000000
6/1/2010	2:52:03 PM	SiCl4 MFC set to  50.000000
6/1/2010	2:52:03 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:52:04 PM	Tube furnace set to 1000
6/1/2010	2:55:22 PM	Helium valve closed
6/1/2010	2:55:22 PM	PH3 valve closed
6/1/2010	2:55:22 PM	Main Vac valve closed
6/1/2010	2:55:22 PM	Bypass valve closed
6/1/2010	2:55:22 PM	H2 valve opened
6/1/2010	2:55:22 PM	BCl3 valve opened
6/1/2010	2:55:22 PM	SiCl4 pre valve opened
6/1/2010	2:55:22 PM	SiCl4 post valve opened
6/1/2010	2:55:22 PM	Bubbler valve opened
6/1/2010	2:55:22 PM	Helium MFC set to  0.000000
6/1/2010	2:55:22 PM	H2 MFC set to  500.000000
6/1/2010	2:55:22 PM	BCl3 MFC set to  35.000000
6/1/2010	2:55:22 PM	PHl3 MFC set to  0.000000
6/1/2010	2:55:22 PM	SiCl4 MFC set to  50.000000
6/1/2010	2:55:22 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	2:55:22 PM	Tube furnace set to 1000
6/1/2010	3:00:22 PM	H2 valve closed
6/1/2010	3:00:22 PM	BCl3 valve closed
6/1/2010	3:00:22 PM	PH3 valve closed
6/1/2010	3:00:22 PM	SiCl4 pre valve closed
6/1/2010	3:00:22 PM	SiCl4 post valve closed
6/1/2010	3:00:22 PM	Main Vac valve closed
6/1/2010	3:00:22 PM	Bypass valve closed
6/1/2010	3:00:22 PM	Helium valve opened
6/1/2010	3:00:22 PM	Bubbler valve opened
6/1/2010	3:00:22 PM	Helium MFC set to  500.000000
6/1/2010	3:00:22 PM	H2 MFC set to  0.000000
6/1/2010	3:00:22 PM	BCl3 MFC set to  0.000000
6/1/2010	3:00:22 PM	PHl3 MFC set to  0.000000
6/1/2010	3:00:22 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:00:22 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:00:22 PM	Tube furnace set to 0
6/1/2010	3:20:22 PM	Helium valve closed
6/1/2010	3:20:22 PM	H2 valve closed
6/1/2010	3:20:22 PM	BCl3 valve closed
6/1/2010	3:20:22 PM	PH3 valve closed
6/1/2010	3:20:22 PM	SiCl4 pre valve closed
6/1/2010	3:20:22 PM	SiCl4 post valve closed
6/1/2010	3:20:22 PM	Main Vac valve closed
6/1/2010	3:20:22 PM	Bypass valve closed
6/1/2010	3:20:22 PM	Bubbler valve closed
6/1/2010	3:20:22 PM	Helium MFC set to  0.000000
6/1/2010	3:20:22 PM	H2 MFC set to  0.000000
6/1/2010	3:20:22 PM	BCl3 MFC set to  0.000000
6/1/2010	3:20:22 PM	PHl3 MFC set to  0.000000
6/1/2010	3:20:22 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:20:22 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:20:22 PM	Tube furnace set to 0
6/1/2010	3:20:22 PM	Run finished at 3:20 PM
6/1/2010	3:44:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	3:44:47 PM	Recipe started at 3:44 PM
6/1/2010	3:44:47 PM	Helium valve closed
6/1/2010	3:44:47 PM	H2 valve closed
6/1/2010	3:44:47 PM	BCl3 valve closed
6/1/2010	3:44:47 PM	PH3 valve closed
6/1/2010	3:44:47 PM	SiCl4 pre valve closed
6/1/2010	3:44:47 PM	SiCl4 post valve closed
6/1/2010	3:44:47 PM	Main Vac valve closed
6/1/2010	3:44:47 PM	Bubbler valve closed
6/1/2010	3:44:47 PM	Bypass valve opened
6/1/2010	3:44:47 PM	Helium MFC set to  0.000000
6/1/2010	3:44:47 PM	H2 MFC set to  0.000000
6/1/2010	3:44:47 PM	BCl3 MFC set to  0.000000
6/1/2010	3:44:47 PM	PHl3 MFC set to  0.000000
6/1/2010	3:44:48 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:44:48 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:44:48 PM	Tube furnace set to 0
6/1/2010	3:45:35 PM	Helium valve closed
6/1/2010	3:45:35 PM	H2 valve closed
6/1/2010	3:45:35 PM	BCl3 valve closed
6/1/2010	3:45:35 PM	PH3 valve closed
6/1/2010	3:45:35 PM	SiCl4 pre valve closed
6/1/2010	3:45:35 PM	SiCl4 post valve closed
6/1/2010	3:45:35 PM	Bubbler valve closed
6/1/2010	3:45:35 PM	Main Vac valve opened
6/1/2010	3:45:35 PM	Bypass valve opened
6/1/2010	3:45:35 PM	Helium MFC set to  0.000000
6/1/2010	3:45:35 PM	H2 MFC set to  0.000000
6/1/2010	3:45:35 PM	BCl3 MFC set to  0.000000
6/1/2010	3:45:35 PM	PHl3 MFC set to  0.000000
6/1/2010	3:45:35 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:45:35 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:45:35 PM	Tube furnace set to 0
6/1/2010	3:45:36 PM	Run finished at 3:45 PM
6/1/2010	3:45:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	3:46:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	3:46:23 PM	Recipe started at 3:46 PM
6/1/2010	3:46:23 PM	H2 valve closed
6/1/2010	3:46:23 PM	BCl3 valve closed
6/1/2010	3:46:23 PM	PH3 valve closed
6/1/2010	3:46:23 PM	SiCl4 pre valve closed
6/1/2010	3:46:23 PM	SiCl4 post valve closed
6/1/2010	3:46:23 PM	Main Vac valve closed
6/1/2010	3:46:23 PM	Bypass valve closed
6/1/2010	3:46:23 PM	Bubbler valve closed
6/1/2010	3:46:23 PM	Helium valve opened
6/1/2010	3:46:23 PM	Helium MFC set to  500.000000
6/1/2010	3:46:23 PM	H2 MFC set to  0.000000
6/1/2010	3:46:23 PM	BCl3 MFC set to  0.000000
6/1/2010	3:46:23 PM	PHl3 MFC set to  0.000000
6/1/2010	3:46:23 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:46:23 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:46:23 PM	Tube furnace set to 0
6/1/2010	3:47:42 PM	Helium valve closed
6/1/2010	3:47:42 PM	H2 valve closed
6/1/2010	3:47:42 PM	BCl3 valve closed
6/1/2010	3:47:42 PM	PH3 valve closed
6/1/2010	3:47:42 PM	SiCl4 pre valve closed
6/1/2010	3:47:42 PM	SiCl4 post valve closed
6/1/2010	3:47:42 PM	Main Vac valve closed
6/1/2010	3:47:42 PM	Bypass valve closed
6/1/2010	3:47:42 PM	Bubbler valve closed
6/1/2010	3:47:42 PM	Helium MFC set to  0.000000
6/1/2010	3:47:42 PM	H2 MFC set to  0.000000
6/1/2010	3:47:42 PM	BCl3 MFC set to  0.000000
6/1/2010	3:47:42 PM	PHl3 MFC set to  0.000000
6/1/2010	3:47:42 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:47:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:47:42 PM	Tube furnace set to 0
6/1/2010	3:47:57 PM	Helium valve closed
6/1/2010	3:47:57 PM	H2 valve closed
6/1/2010	3:47:57 PM	BCl3 valve closed
6/1/2010	3:47:57 PM	PH3 valve closed
6/1/2010	3:47:57 PM	SiCl4 pre valve closed
6/1/2010	3:47:57 PM	SiCl4 post valve closed
6/1/2010	3:47:57 PM	Main Vac valve closed
6/1/2010	3:47:57 PM	Bubbler valve closed
6/1/2010	3:47:57 PM	Bypass valve opened
6/1/2010	3:47:57 PM	Helium MFC set to  0.000000
6/1/2010	3:47:57 PM	H2 MFC set to  0.000000
6/1/2010	3:47:57 PM	BCl3 MFC set to  0.000000
6/1/2010	3:47:57 PM	PHl3 MFC set to  0.000000
6/1/2010	3:47:57 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:47:57 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:47:58 PM	Tube furnace set to 0
6/1/2010	3:48:30 PM	Helium valve closed
6/1/2010	3:48:30 PM	H2 valve closed
6/1/2010	3:48:30 PM	BCl3 valve closed
6/1/2010	3:48:30 PM	PH3 valve closed
6/1/2010	3:48:30 PM	SiCl4 pre valve closed
6/1/2010	3:48:30 PM	SiCl4 post valve closed
6/1/2010	3:48:30 PM	Bubbler valve closed
6/1/2010	3:48:30 PM	Main Vac valve opened
6/1/2010	3:48:30 PM	Bypass valve opened
6/1/2010	3:48:30 PM	Helium MFC set to  0.000000
6/1/2010	3:48:30 PM	H2 MFC set to  0.000000
6/1/2010	3:48:30 PM	BCl3 MFC set to  0.000000
6/1/2010	3:48:30 PM	PHl3 MFC set to  0.000000
6/1/2010	3:48:30 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:48:30 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:48:30 PM	Tube furnace set to 0
6/1/2010	3:53:30 PM	H2 valve closed
6/1/2010	3:53:30 PM	BCl3 valve closed
6/1/2010	3:53:30 PM	PH3 valve closed
6/1/2010	3:53:30 PM	SiCl4 pre valve closed
6/1/2010	3:53:30 PM	SiCl4 post valve closed
6/1/2010	3:53:30 PM	Main Vac valve closed
6/1/2010	3:53:30 PM	Bypass valve closed
6/1/2010	3:53:30 PM	Bubbler valve closed
6/1/2010	3:53:30 PM	Helium valve opened
6/1/2010	3:53:30 PM	Helium MFC set to  500.000000
6/1/2010	3:53:30 PM	H2 MFC set to  0.000000
6/1/2010	3:53:30 PM	BCl3 MFC set to  0.000000
6/1/2010	3:53:30 PM	PHl3 MFC set to  0.000000
6/1/2010	3:53:30 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:53:30 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:53:30 PM	Tube furnace set to 0
6/1/2010	3:54:49 PM	Helium valve closed
6/1/2010	3:54:49 PM	H2 valve closed
6/1/2010	3:54:49 PM	BCl3 valve closed
6/1/2010	3:54:49 PM	PH3 valve closed
6/1/2010	3:54:49 PM	SiCl4 pre valve closed
6/1/2010	3:54:49 PM	SiCl4 post valve closed
6/1/2010	3:54:49 PM	Main Vac valve closed
6/1/2010	3:54:49 PM	Bypass valve closed
6/1/2010	3:54:49 PM	Bubbler valve closed
6/1/2010	3:54:49 PM	Helium MFC set to  0.000000
6/1/2010	3:54:49 PM	H2 MFC set to  0.000000
6/1/2010	3:54:49 PM	BCl3 MFC set to  0.000000
6/1/2010	3:54:49 PM	PHl3 MFC set to  0.000000
6/1/2010	3:54:49 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:54:49 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:54:49 PM	Tube furnace set to 0
6/1/2010	3:55:04 PM	Helium valve closed
6/1/2010	3:55:04 PM	H2 valve closed
6/1/2010	3:55:04 PM	BCl3 valve closed
6/1/2010	3:55:04 PM	PH3 valve closed
6/1/2010	3:55:04 PM	SiCl4 pre valve closed
6/1/2010	3:55:04 PM	SiCl4 post valve closed
6/1/2010	3:55:04 PM	Main Vac valve closed
6/1/2010	3:55:04 PM	Bubbler valve closed
6/1/2010	3:55:04 PM	Bypass valve opened
6/1/2010	3:55:04 PM	Helium MFC set to  0.000000
6/1/2010	3:55:04 PM	H2 MFC set to  0.000000
6/1/2010	3:55:04 PM	BCl3 MFC set to  0.000000
6/1/2010	3:55:04 PM	PHl3 MFC set to  0.000000
6/1/2010	3:55:04 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:55:04 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:55:04 PM	Tube furnace set to 0
6/1/2010	3:55:36 PM	Helium valve closed
6/1/2010	3:55:36 PM	H2 valve closed
6/1/2010	3:55:36 PM	BCl3 valve closed
6/1/2010	3:55:36 PM	PH3 valve closed
6/1/2010	3:55:36 PM	SiCl4 pre valve closed
6/1/2010	3:55:36 PM	SiCl4 post valve closed
6/1/2010	3:55:36 PM	Bubbler valve closed
6/1/2010	3:55:36 PM	Main Vac valve opened
6/1/2010	3:55:36 PM	Bypass valve opened
6/1/2010	3:55:36 PM	Helium MFC set to  0.000000
6/1/2010	3:55:36 PM	H2 MFC set to  0.000000
6/1/2010	3:55:36 PM	BCl3 MFC set to  0.000000
6/1/2010	3:55:36 PM	PHl3 MFC set to  0.000000
6/1/2010	3:55:36 PM	SiCl4 MFC set to  0.000000
6/1/2010	3:55:36 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	3:55:36 PM	Tube furnace set to 0
6/1/2010	4:00:36 PM	H2 valve closed
6/1/2010	4:00:36 PM	BCl3 valve closed
6/1/2010	4:00:36 PM	PH3 valve closed
6/1/2010	4:00:36 PM	SiCl4 pre valve closed
6/1/2010	4:00:36 PM	SiCl4 post valve closed
6/1/2010	4:00:36 PM	Main Vac valve closed
6/1/2010	4:00:36 PM	Bypass valve closed
6/1/2010	4:00:36 PM	Bubbler valve closed
6/1/2010	4:00:36 PM	Helium valve opened
6/1/2010	4:00:36 PM	Helium MFC set to  500.000000
6/1/2010	4:00:36 PM	H2 MFC set to  0.000000
6/1/2010	4:00:36 PM	BCl3 MFC set to  0.000000
6/1/2010	4:00:36 PM	PHl3 MFC set to  0.000000
6/1/2010	4:00:36 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:00:36 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:00:36 PM	Tube furnace set to 0
6/1/2010	4:01:54 PM	Helium valve closed
6/1/2010	4:01:54 PM	H2 valve closed
6/1/2010	4:01:54 PM	BCl3 valve closed
6/1/2010	4:01:54 PM	PH3 valve closed
6/1/2010	4:01:54 PM	SiCl4 pre valve closed
6/1/2010	4:01:54 PM	SiCl4 post valve closed
6/1/2010	4:01:54 PM	Main Vac valve closed
6/1/2010	4:01:54 PM	Bypass valve closed
6/1/2010	4:01:55 PM	Bubbler valve closed
6/1/2010	4:01:55 PM	Helium MFC set to  0.000000
6/1/2010	4:01:55 PM	H2 MFC set to  0.000000
6/1/2010	4:01:55 PM	BCl3 MFC set to  0.000000
6/1/2010	4:01:55 PM	PHl3 MFC set to  0.000000
6/1/2010	4:01:55 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:01:55 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:01:55 PM	Tube furnace set to 0
6/1/2010	4:02:10 PM	Helium valve closed
6/1/2010	4:02:10 PM	H2 valve closed
6/1/2010	4:02:10 PM	BCl3 valve closed
6/1/2010	4:02:10 PM	PH3 valve closed
6/1/2010	4:02:10 PM	SiCl4 pre valve closed
6/1/2010	4:02:10 PM	SiCl4 post valve closed
6/1/2010	4:02:10 PM	Main Vac valve closed
6/1/2010	4:02:10 PM	Bubbler valve closed
6/1/2010	4:02:10 PM	Bypass valve opened
6/1/2010	4:02:10 PM	Helium MFC set to  0.000000
6/1/2010	4:02:10 PM	H2 MFC set to  0.000000
6/1/2010	4:02:10 PM	BCl3 MFC set to  0.000000
6/1/2010	4:02:10 PM	PHl3 MFC set to  0.000000
6/1/2010	4:02:10 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:02:10 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:02:10 PM	Tube furnace set to 0
6/1/2010	4:02:42 PM	Helium valve closed
6/1/2010	4:02:42 PM	H2 valve closed
6/1/2010	4:02:42 PM	BCl3 valve closed
6/1/2010	4:02:42 PM	PH3 valve closed
6/1/2010	4:02:42 PM	SiCl4 pre valve closed
6/1/2010	4:02:42 PM	SiCl4 post valve closed
6/1/2010	4:02:42 PM	Bubbler valve closed
6/1/2010	4:02:42 PM	Main Vac valve opened
6/1/2010	4:02:42 PM	Bypass valve opened
6/1/2010	4:02:42 PM	Helium MFC set to  0.000000
6/1/2010	4:02:42 PM	H2 MFC set to  0.000000
6/1/2010	4:02:42 PM	BCl3 MFC set to  0.000000
6/1/2010	4:02:42 PM	PHl3 MFC set to  0.000000
6/1/2010	4:02:42 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:02:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:02:42 PM	Tube furnace set to 0
6/1/2010	4:07:42 PM	Helium valve closed
6/1/2010	4:07:42 PM	H2 valve closed
6/1/2010	4:07:42 PM	BCl3 valve closed
6/1/2010	4:07:42 PM	PH3 valve closed
6/1/2010	4:07:42 PM	SiCl4 pre valve closed
6/1/2010	4:07:42 PM	SiCl4 post valve closed
6/1/2010	4:07:42 PM	Bubbler valve closed
6/1/2010	4:07:42 PM	Main Vac valve opened
6/1/2010	4:07:42 PM	Bypass valve opened
6/1/2010	4:07:42 PM	Helium MFC set to  0.000000
6/1/2010	4:07:42 PM	H2 MFC set to  0.000000
6/1/2010	4:07:42 PM	BCl3 MFC set to  0.000000
6/1/2010	4:07:42 PM	PHl3 MFC set to  0.000000
6/1/2010	4:07:42 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:07:42 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:07:42 PM	Tube furnace set to 0
6/1/2010	4:07:43 PM	Run finished at 4:07 PM
6/1/2010	4:07:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	4:07:52 PM	Bypass valve closed
6/1/2010	4:07:53 PM	Main Vac valve closed
6/1/2010	4:08:18 PM	Bypass valve opened
6/1/2010	4:08:18 PM	Main Vac valve opened
6/1/2010	4:10:03 PM	Recipe started at 4:10 PM
6/1/2010	4:10:03 PM	Helium valve closed
6/1/2010	4:10:03 PM	BCl3 valve closed
6/1/2010	4:10:03 PM	PH3 valve closed
6/1/2010	4:10:03 PM	SiCl4 pre valve closed
6/1/2010	4:10:03 PM	SiCl4 post valve closed
6/1/2010	4:10:03 PM	Main Vac valve closed
6/1/2010	4:10:03 PM	Bypass valve closed
6/1/2010	4:10:03 PM	Bubbler valve closed
6/1/2010	4:10:03 PM	H2 valve opened
6/1/2010	4:10:03 PM	Helium MFC set to  0.000000
6/1/2010	4:10:03 PM	H2 MFC set to  500.000000
6/1/2010	4:10:03 PM	BCl3 MFC set to  0.000000
6/1/2010	4:10:03 PM	PHl3 MFC set to  0.000000
6/1/2010	4:10:03 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:10:03 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:10:03 PM	Tube furnace set to 0
6/1/2010	4:11:23 PM	Helium valve closed
6/1/2010	4:11:23 PM	BCl3 valve closed
6/1/2010	4:11:23 PM	PH3 valve closed
6/1/2010	4:11:23 PM	SiCl4 pre valve closed
6/1/2010	4:11:23 PM	SiCl4 post valve closed
6/1/2010	4:11:23 PM	Main Vac valve closed
6/1/2010	4:11:23 PM	Bypass valve closed
6/1/2010	4:11:23 PM	H2 valve opened
6/1/2010	4:11:23 PM	Bubbler valve opened
6/1/2010	4:11:23 PM	Helium MFC set to  0.000000
6/1/2010	4:11:23 PM	H2 MFC set to  500.000000
6/1/2010	4:11:23 PM	BCl3 MFC set to  0.000000
6/1/2010	4:11:23 PM	PHl3 MFC set to  0.000000
6/1/2010	4:11:23 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:11:23 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:11:23 PM	Tube furnace set to 1000
6/1/2010	4:19:37 PM	Helium valve closed
6/1/2010	4:19:37 PM	PH3 valve closed
6/1/2010	4:19:37 PM	Main Vac valve closed
6/1/2010	4:19:37 PM	Bypass valve closed
6/1/2010	4:19:37 PM	H2 valve opened
6/1/2010	4:19:37 PM	BCl3 valve opened
6/1/2010	4:19:37 PM	SiCl4 pre valve opened
6/1/2010	4:19:37 PM	SiCl4 post valve opened
6/1/2010	4:19:37 PM	Bubbler valve opened
6/1/2010	4:19:37 PM	Helium MFC set to  0.000000
6/1/2010	4:19:37 PM	H2 MFC set to  500.000000
6/1/2010	4:19:37 PM	BCl3 MFC set to  35.000000
6/1/2010	4:19:37 PM	PHl3 MFC set to  0.000000
6/1/2010	4:19:37 PM	SiCl4 MFC set to  50.000000
6/1/2010	4:19:37 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:19:37 PM	Tube furnace set to 1000
6/1/2010	4:22:46 PM	Helium valve closed
6/1/2010	4:22:46 PM	PH3 valve closed
6/1/2010	4:22:46 PM	Main Vac valve closed
6/1/2010	4:22:46 PM	Bypass valve closed
6/1/2010	4:22:46 PM	H2 valve opened
6/1/2010	4:22:46 PM	BCl3 valve opened
6/1/2010	4:22:46 PM	SiCl4 pre valve opened
6/1/2010	4:22:46 PM	SiCl4 post valve opened
6/1/2010	4:22:46 PM	Bubbler valve opened
6/1/2010	4:22:46 PM	Helium MFC set to  0.000000
6/1/2010	4:22:46 PM	H2 MFC set to  500.000000
6/1/2010	4:22:46 PM	BCl3 MFC set to  35.000000
6/1/2010	4:22:46 PM	PHl3 MFC set to  0.000000
6/1/2010	4:22:46 PM	SiCl4 MFC set to  50.000000
6/1/2010	4:22:46 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:22:46 PM	Tube furnace set to 1000
6/1/2010	4:27:46 PM	H2 valve closed
6/1/2010	4:27:46 PM	BCl3 valve closed
6/1/2010	4:27:46 PM	PH3 valve closed
6/1/2010	4:27:46 PM	SiCl4 pre valve closed
6/1/2010	4:27:46 PM	SiCl4 post valve closed
6/1/2010	4:27:46 PM	Main Vac valve closed
6/1/2010	4:27:46 PM	Bypass valve closed
6/1/2010	4:27:46 PM	Helium valve opened
6/1/2010	4:27:46 PM	Bubbler valve opened
6/1/2010	4:27:46 PM	Helium MFC set to  500.000000
6/1/2010	4:27:46 PM	H2 MFC set to  0.000000
6/1/2010	4:27:46 PM	BCl3 MFC set to  0.000000
6/1/2010	4:27:46 PM	PHl3 MFC set to  0.000000
6/1/2010	4:27:46 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:27:46 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:27:46 PM	Tube furnace set to 0
6/1/2010	4:47:46 PM	Helium valve closed
6/1/2010	4:47:46 PM	H2 valve closed
6/1/2010	4:47:46 PM	BCl3 valve closed
6/1/2010	4:47:46 PM	PH3 valve closed
6/1/2010	4:47:46 PM	SiCl4 pre valve closed
6/1/2010	4:47:46 PM	SiCl4 post valve closed
6/1/2010	4:47:46 PM	Main Vac valve closed
6/1/2010	4:47:46 PM	Bypass valve closed
6/1/2010	4:47:46 PM	Bubbler valve closed
6/1/2010	4:47:46 PM	Helium MFC set to  0.000000
6/1/2010	4:47:46 PM	H2 MFC set to  0.000000
6/1/2010	4:47:46 PM	BCl3 MFC set to  0.000000
6/1/2010	4:47:46 PM	PHl3 MFC set to  0.000000
6/1/2010	4:47:46 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:47:46 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:47:46 PM	Tube furnace set to 0
6/1/2010	4:47:47 PM	Run finished at 4:47 PM
6/1/2010	4:50:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	4:50:57 PM	Recipe started at 4:50 PM
6/1/2010	4:50:57 PM	Helium valve closed
6/1/2010	4:50:57 PM	H2 valve closed
6/1/2010	4:50:57 PM	BCl3 valve closed
6/1/2010	4:50:57 PM	PH3 valve closed
6/1/2010	4:50:57 PM	SiCl4 pre valve closed
6/1/2010	4:50:57 PM	SiCl4 post valve closed
6/1/2010	4:50:57 PM	Main Vac valve closed
6/1/2010	4:50:57 PM	Bubbler valve closed
6/1/2010	4:50:57 PM	Bypass valve opened
6/1/2010	4:50:57 PM	Helium MFC set to  0.000000
6/1/2010	4:50:57 PM	H2 MFC set to  0.000000
6/1/2010	4:50:57 PM	BCl3 MFC set to  0.000000
6/1/2010	4:50:57 PM	PHl3 MFC set to  0.000000
6/1/2010	4:50:57 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:50:57 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:50:58 PM	Tube furnace set to 0
6/1/2010	4:51:44 PM	Helium valve closed
6/1/2010	4:51:44 PM	H2 valve closed
6/1/2010	4:51:44 PM	BCl3 valve closed
6/1/2010	4:51:44 PM	PH3 valve closed
6/1/2010	4:51:44 PM	SiCl4 pre valve closed
6/1/2010	4:51:44 PM	SiCl4 post valve closed
6/1/2010	4:51:44 PM	Bubbler valve closed
6/1/2010	4:51:44 PM	Main Vac valve opened
6/1/2010	4:51:44 PM	Bypass valve opened
6/1/2010	4:51:44 PM	Helium MFC set to  0.000000
6/1/2010	4:51:44 PM	H2 MFC set to  0.000000
6/1/2010	4:51:44 PM	BCl3 MFC set to  0.000000
6/1/2010	4:51:44 PM	PHl3 MFC set to  0.000000
6/1/2010	4:51:44 PM	SiCl4 MFC set to  0.000000
6/1/2010	4:51:44 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	4:51:44 PM	Tube furnace set to 0
6/1/2010	4:51:44 PM	Run finished at 4:51 PM
6/1/2010	4:51:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	5:12:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2010	5:12:44 PM	Recipe started at 5:12 PM
6/1/2010	5:12:44 PM	H2 valve closed
6/1/2010	5:12:44 PM	BCl3 valve closed
6/1/2010	5:12:44 PM	PH3 valve closed
6/1/2010	5:12:44 PM	SiCl4 pre valve closed
6/1/2010	5:12:44 PM	SiCl4 post valve closed
6/1/2010	5:12:44 PM	Main Vac valve closed
6/1/2010	5:12:44 PM	Bypass valve closed
6/1/2010	5:12:44 PM	Bubbler valve closed
6/1/2010	5:12:44 PM	Helium valve opened
6/1/2010	5:12:44 PM	Helium MFC set to  500.000000
6/1/2010	5:12:44 PM	H2 MFC set to  0.000000
6/1/2010	5:12:44 PM	BCl3 MFC set to  0.000000
6/1/2010	5:12:44 PM	PHl3 MFC set to  0.000000
6/1/2010	5:12:44 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:12:44 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:12:44 PM	Tube furnace set to 0
6/1/2010	5:14:01 PM	Helium valve closed
6/1/2010	5:14:01 PM	H2 valve closed
6/1/2010	5:14:01 PM	BCl3 valve closed
6/1/2010	5:14:01 PM	PH3 valve closed
6/1/2010	5:14:01 PM	SiCl4 pre valve closed
6/1/2010	5:14:01 PM	SiCl4 post valve closed
6/1/2010	5:14:01 PM	Main Vac valve closed
6/1/2010	5:14:01 PM	Bypass valve closed
6/1/2010	5:14:01 PM	Bubbler valve closed
6/1/2010	5:14:01 PM	Helium MFC set to  0.000000
6/1/2010	5:14:01 PM	H2 MFC set to  0.000000
6/1/2010	5:14:01 PM	BCl3 MFC set to  0.000000
6/1/2010	5:14:01 PM	PHl3 MFC set to  0.000000
6/1/2010	5:14:01 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:14:01 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:14:01 PM	Tube furnace set to 0
6/1/2010	5:14:01 PM	Run finished at 5:14 PM
6/1/2010	5:14:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/1/2010	5:16:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	5:16:44 PM	Recipe started at 5:16 PM
6/1/2010	5:16:44 PM	Helium valve closed
6/1/2010	5:16:44 PM	H2 valve closed
6/1/2010	5:16:44 PM	BCl3 valve closed
6/1/2010	5:16:44 PM	PH3 valve closed
6/1/2010	5:16:44 PM	SiCl4 pre valve closed
6/1/2010	5:16:44 PM	SiCl4 post valve closed
6/1/2010	5:16:44 PM	Main Vac valve closed
6/1/2010	5:16:44 PM	Bubbler valve closed
6/1/2010	5:16:44 PM	Bypass valve opened
6/1/2010	5:16:44 PM	Helium MFC set to  0.000000
6/1/2010	5:16:44 PM	H2 MFC set to  0.000000
6/1/2010	5:16:44 PM	BCl3 MFC set to  0.000000
6/1/2010	5:16:44 PM	PHl3 MFC set to  0.000000
6/1/2010	5:16:44 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:16:44 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:16:44 PM	Tube furnace set to 0
6/1/2010	5:17:29 PM	Helium valve closed
6/1/2010	5:17:29 PM	H2 valve closed
6/1/2010	5:17:29 PM	BCl3 valve closed
6/1/2010	5:17:29 PM	PH3 valve closed
6/1/2010	5:17:29 PM	SiCl4 pre valve closed
6/1/2010	5:17:29 PM	SiCl4 post valve closed
6/1/2010	5:17:29 PM	Bubbler valve closed
6/1/2010	5:17:29 PM	Main Vac valve opened
6/1/2010	5:17:29 PM	Bypass valve opened
6/1/2010	5:17:29 PM	Helium MFC set to  0.000000
6/1/2010	5:17:29 PM	H2 MFC set to  0.000000
6/1/2010	5:17:29 PM	BCl3 MFC set to  0.000000
6/1/2010	5:17:29 PM	PHl3 MFC set to  0.000000
6/1/2010	5:17:29 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:17:29 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:17:29 PM	Tube furnace set to 0
6/1/2010	5:17:29 PM	Run finished at 5:17 PM
6/1/2010	5:17:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	5:17:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	5:17:53 PM	Recipe started at 5:17 PM
6/1/2010	5:17:53 PM	H2 valve closed
6/1/2010	5:17:53 PM	BCl3 valve closed
6/1/2010	5:17:53 PM	PH3 valve closed
6/1/2010	5:17:53 PM	SiCl4 pre valve closed
6/1/2010	5:17:53 PM	SiCl4 post valve closed
6/1/2010	5:17:53 PM	Main Vac valve closed
6/1/2010	5:17:53 PM	Bypass valve closed
6/1/2010	5:17:53 PM	Bubbler valve closed
6/1/2010	5:17:53 PM	Helium valve opened
6/1/2010	5:17:53 PM	Helium MFC set to  500.000000
6/1/2010	5:17:53 PM	H2 MFC set to  0.000000
6/1/2010	5:17:53 PM	BCl3 MFC set to  0.000000
6/1/2010	5:17:53 PM	PHl3 MFC set to  0.000000
6/1/2010	5:17:53 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:17:53 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:17:53 PM	Tube furnace set to 0
6/1/2010	5:19:13 PM	Helium valve closed
6/1/2010	5:19:13 PM	H2 valve closed
6/1/2010	5:19:13 PM	BCl3 valve closed
6/1/2010	5:19:13 PM	PH3 valve closed
6/1/2010	5:19:13 PM	SiCl4 pre valve closed
6/1/2010	5:19:13 PM	SiCl4 post valve closed
6/1/2010	5:19:13 PM	Main Vac valve closed
6/1/2010	5:19:13 PM	Bypass valve closed
6/1/2010	5:19:13 PM	Bubbler valve closed
6/1/2010	5:19:13 PM	Helium MFC set to  0.000000
6/1/2010	5:19:13 PM	H2 MFC set to  0.000000
6/1/2010	5:19:13 PM	BCl3 MFC set to  0.000000
6/1/2010	5:19:13 PM	PHl3 MFC set to  0.000000
6/1/2010	5:19:13 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:19:13 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:19:13 PM	Tube furnace set to 0
6/1/2010	5:19:28 PM	Helium valve closed
6/1/2010	5:19:28 PM	H2 valve closed
6/1/2010	5:19:28 PM	BCl3 valve closed
6/1/2010	5:19:28 PM	PH3 valve closed
6/1/2010	5:19:28 PM	SiCl4 pre valve closed
6/1/2010	5:19:28 PM	SiCl4 post valve closed
6/1/2010	5:19:28 PM	Main Vac valve closed
6/1/2010	5:19:28 PM	Bubbler valve closed
6/1/2010	5:19:28 PM	Bypass valve opened
6/1/2010	5:19:28 PM	Helium MFC set to  0.000000
6/1/2010	5:19:28 PM	H2 MFC set to  0.000000
6/1/2010	5:19:28 PM	BCl3 MFC set to  0.000000
6/1/2010	5:19:28 PM	PHl3 MFC set to  0.000000
6/1/2010	5:19:28 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:19:28 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:19:29 PM	Tube furnace set to 0
6/1/2010	5:20:01 PM	Helium valve closed
6/1/2010	5:20:01 PM	H2 valve closed
6/1/2010	5:20:01 PM	BCl3 valve closed
6/1/2010	5:20:01 PM	PH3 valve closed
6/1/2010	5:20:01 PM	SiCl4 pre valve closed
6/1/2010	5:20:01 PM	SiCl4 post valve closed
6/1/2010	5:20:01 PM	Bubbler valve closed
6/1/2010	5:20:01 PM	Main Vac valve opened
6/1/2010	5:20:01 PM	Bypass valve opened
6/1/2010	5:20:01 PM	Helium MFC set to  0.000000
6/1/2010	5:20:01 PM	H2 MFC set to  0.000000
6/1/2010	5:20:01 PM	BCl3 MFC set to  0.000000
6/1/2010	5:20:01 PM	PHl3 MFC set to  0.000000
6/1/2010	5:20:01 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:20:01 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:20:01 PM	Tube furnace set to 0
6/1/2010	5:25:01 PM	H2 valve closed
6/1/2010	5:25:01 PM	BCl3 valve closed
6/1/2010	5:25:01 PM	PH3 valve closed
6/1/2010	5:25:01 PM	SiCl4 pre valve closed
6/1/2010	5:25:01 PM	SiCl4 post valve closed
6/1/2010	5:25:01 PM	Main Vac valve closed
6/1/2010	5:25:01 PM	Bypass valve closed
6/1/2010	5:25:01 PM	Bubbler valve closed
6/1/2010	5:25:01 PM	Helium valve opened
6/1/2010	5:25:01 PM	Helium MFC set to  500.000000
6/1/2010	5:25:01 PM	H2 MFC set to  0.000000
6/1/2010	5:25:01 PM	BCl3 MFC set to  0.000000
6/1/2010	5:25:01 PM	PHl3 MFC set to  0.000000
6/1/2010	5:25:01 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:25:01 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:25:01 PM	Tube furnace set to 0
6/1/2010	5:26:21 PM	Helium valve closed
6/1/2010	5:26:21 PM	H2 valve closed
6/1/2010	5:26:21 PM	BCl3 valve closed
6/1/2010	5:26:21 PM	PH3 valve closed
6/1/2010	5:26:21 PM	SiCl4 pre valve closed
6/1/2010	5:26:21 PM	SiCl4 post valve closed
6/1/2010	5:26:21 PM	Main Vac valve closed
6/1/2010	5:26:21 PM	Bypass valve closed
6/1/2010	5:26:21 PM	Bubbler valve closed
6/1/2010	5:26:21 PM	Helium MFC set to  0.000000
6/1/2010	5:26:21 PM	H2 MFC set to  0.000000
6/1/2010	5:26:21 PM	BCl3 MFC set to  0.000000
6/1/2010	5:26:21 PM	PHl3 MFC set to  0.000000
6/1/2010	5:26:21 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:26:21 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:26:21 PM	Tube furnace set to 0
6/1/2010	5:26:36 PM	Helium valve closed
6/1/2010	5:26:36 PM	H2 valve closed
6/1/2010	5:26:36 PM	BCl3 valve closed
6/1/2010	5:26:36 PM	PH3 valve closed
6/1/2010	5:26:36 PM	SiCl4 pre valve closed
6/1/2010	5:26:36 PM	SiCl4 post valve closed
6/1/2010	5:26:36 PM	Main Vac valve closed
6/1/2010	5:26:36 PM	Bubbler valve closed
6/1/2010	5:26:36 PM	Bypass valve opened
6/1/2010	5:26:36 PM	Helium MFC set to  0.000000
6/1/2010	5:26:36 PM	H2 MFC set to  0.000000
6/1/2010	5:26:36 PM	BCl3 MFC set to  0.000000
6/1/2010	5:26:36 PM	PHl3 MFC set to  0.000000
6/1/2010	5:26:36 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:26:36 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:26:36 PM	Tube furnace set to 0
6/1/2010	5:27:08 PM	Helium valve closed
6/1/2010	5:27:08 PM	H2 valve closed
6/1/2010	5:27:08 PM	BCl3 valve closed
6/1/2010	5:27:08 PM	PH3 valve closed
6/1/2010	5:27:08 PM	SiCl4 pre valve closed
6/1/2010	5:27:08 PM	SiCl4 post valve closed
6/1/2010	5:27:08 PM	Bubbler valve closed
6/1/2010	5:27:08 PM	Main Vac valve opened
6/1/2010	5:27:08 PM	Bypass valve opened
6/1/2010	5:27:08 PM	Helium MFC set to  0.000000
6/1/2010	5:27:08 PM	H2 MFC set to  0.000000
6/1/2010	5:27:08 PM	BCl3 MFC set to  0.000000
6/1/2010	5:27:08 PM	PHl3 MFC set to  0.000000
6/1/2010	5:27:08 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:27:08 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:27:09 PM	Tube furnace set to 0
6/1/2010	5:32:09 PM	H2 valve closed
6/1/2010	5:32:09 PM	BCl3 valve closed
6/1/2010	5:32:09 PM	PH3 valve closed
6/1/2010	5:32:09 PM	SiCl4 pre valve closed
6/1/2010	5:32:09 PM	SiCl4 post valve closed
6/1/2010	5:32:09 PM	Main Vac valve closed
6/1/2010	5:32:09 PM	Bypass valve closed
6/1/2010	5:32:09 PM	Bubbler valve closed
6/1/2010	5:32:09 PM	Helium valve opened
6/1/2010	5:32:09 PM	Helium MFC set to  500.000000
6/1/2010	5:32:09 PM	H2 MFC set to  0.000000
6/1/2010	5:32:09 PM	BCl3 MFC set to  0.000000
6/1/2010	5:32:09 PM	PHl3 MFC set to  0.000000
6/1/2010	5:32:09 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:32:09 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:32:09 PM	Tube furnace set to 0
6/1/2010	5:33:28 PM	Helium valve closed
6/1/2010	5:33:28 PM	H2 valve closed
6/1/2010	5:33:28 PM	BCl3 valve closed
6/1/2010	5:33:28 PM	PH3 valve closed
6/1/2010	5:33:28 PM	SiCl4 pre valve closed
6/1/2010	5:33:28 PM	SiCl4 post valve closed
6/1/2010	5:33:28 PM	Main Vac valve closed
6/1/2010	5:33:28 PM	Bypass valve closed
6/1/2010	5:33:28 PM	Bubbler valve closed
6/1/2010	5:33:28 PM	Helium MFC set to  0.000000
6/1/2010	5:33:28 PM	H2 MFC set to  0.000000
6/1/2010	5:33:28 PM	BCl3 MFC set to  0.000000
6/1/2010	5:33:28 PM	PHl3 MFC set to  0.000000
6/1/2010	5:33:28 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:33:28 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:33:28 PM	Tube furnace set to 0
6/1/2010	5:33:43 PM	Helium valve closed
6/1/2010	5:33:43 PM	H2 valve closed
6/1/2010	5:33:43 PM	BCl3 valve closed
6/1/2010	5:33:43 PM	PH3 valve closed
6/1/2010	5:33:43 PM	SiCl4 pre valve closed
6/1/2010	5:33:43 PM	SiCl4 post valve closed
6/1/2010	5:33:43 PM	Main Vac valve closed
6/1/2010	5:33:43 PM	Bubbler valve closed
6/1/2010	5:33:43 PM	Bypass valve opened
6/1/2010	5:33:43 PM	Helium MFC set to  0.000000
6/1/2010	5:33:43 PM	H2 MFC set to  0.000000
6/1/2010	5:33:43 PM	BCl3 MFC set to  0.000000
6/1/2010	5:33:43 PM	PHl3 MFC set to  0.000000
6/1/2010	5:33:43 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:33:43 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:33:43 PM	Tube furnace set to 0
6/1/2010	5:34:16 PM	Helium valve closed
6/1/2010	5:34:16 PM	H2 valve closed
6/1/2010	5:34:16 PM	BCl3 valve closed
6/1/2010	5:34:16 PM	PH3 valve closed
6/1/2010	5:34:16 PM	SiCl4 pre valve closed
6/1/2010	5:34:16 PM	SiCl4 post valve closed
6/1/2010	5:34:16 PM	Bubbler valve closed
6/1/2010	5:34:16 PM	Main Vac valve opened
6/1/2010	5:34:16 PM	Bypass valve opened
6/1/2010	5:34:16 PM	Helium MFC set to  0.000000
6/1/2010	5:34:16 PM	H2 MFC set to  0.000000
6/1/2010	5:34:16 PM	BCl3 MFC set to  0.000000
6/1/2010	5:34:16 PM	PHl3 MFC set to  0.000000
6/1/2010	5:34:16 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:34:16 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:34:16 PM	Tube furnace set to 0
6/1/2010	5:39:16 PM	Helium valve closed
6/1/2010	5:39:16 PM	H2 valve closed
6/1/2010	5:39:16 PM	BCl3 valve closed
6/1/2010	5:39:16 PM	PH3 valve closed
6/1/2010	5:39:16 PM	SiCl4 pre valve closed
6/1/2010	5:39:16 PM	SiCl4 post valve closed
6/1/2010	5:39:16 PM	Bubbler valve closed
6/1/2010	5:39:16 PM	Main Vac valve opened
6/1/2010	5:39:16 PM	Bypass valve opened
6/1/2010	5:39:16 PM	Helium MFC set to  0.000000
6/1/2010	5:39:16 PM	H2 MFC set to  0.000000
6/1/2010	5:39:16 PM	BCl3 MFC set to  0.000000
6/1/2010	5:39:16 PM	PHl3 MFC set to  0.000000
6/1/2010	5:39:16 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:39:16 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:39:16 PM	Tube furnace set to 0
6/1/2010	5:39:17 PM	Run finished at 5:39 PM
6/1/2010	5:39:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/1/2010	5:46:07 PM	Bypass valve closed
6/1/2010	5:46:08 PM	Main Vac valve closed
6/1/2010	5:46:22 PM	Bypass valve opened
6/1/2010	5:46:22 PM	Main Vac valve opened
6/1/2010	5:46:58 PM	Recipe started at 5:46 PM
6/1/2010	5:46:58 PM	Helium valve closed
6/1/2010	5:46:58 PM	BCl3 valve closed
6/1/2010	5:46:58 PM	PH3 valve closed
6/1/2010	5:46:58 PM	SiCl4 pre valve closed
6/1/2010	5:46:58 PM	SiCl4 post valve closed
6/1/2010	5:46:58 PM	Main Vac valve closed
6/1/2010	5:46:58 PM	Bypass valve closed
6/1/2010	5:46:58 PM	Bubbler valve closed
6/1/2010	5:46:58 PM	H2 valve opened
6/1/2010	5:46:58 PM	Helium MFC set to  0.000000
6/1/2010	5:46:58 PM	H2 MFC set to  500.000000
6/1/2010	5:46:58 PM	BCl3 MFC set to  0.000000
6/1/2010	5:46:58 PM	PHl3 MFC set to  0.000000
6/1/2010	5:46:58 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:46:58 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:46:58 PM	Tube furnace set to 0
6/1/2010	5:48:19 PM	Helium valve closed
6/1/2010	5:48:19 PM	BCl3 valve closed
6/1/2010	5:48:19 PM	PH3 valve closed
6/1/2010	5:48:19 PM	SiCl4 pre valve closed
6/1/2010	5:48:19 PM	SiCl4 post valve closed
6/1/2010	5:48:19 PM	Main Vac valve closed
6/1/2010	5:48:19 PM	Bypass valve closed
6/1/2010	5:48:19 PM	H2 valve opened
6/1/2010	5:48:19 PM	Bubbler valve opened
6/1/2010	5:48:19 PM	Helium MFC set to  0.000000
6/1/2010	5:48:19 PM	H2 MFC set to  500.000000
6/1/2010	5:48:19 PM	BCl3 MFC set to  0.000000
6/1/2010	5:48:19 PM	PHl3 MFC set to  0.000000
6/1/2010	5:48:19 PM	SiCl4 MFC set to  0.000000
6/1/2010	5:48:19 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:48:19 PM	Tube furnace set to 1000
6/1/2010	5:56:57 PM	Helium valve closed
6/1/2010	5:56:57 PM	PH3 valve closed
6/1/2010	5:56:57 PM	Main Vac valve closed
6/1/2010	5:56:57 PM	Bypass valve closed
6/1/2010	5:56:57 PM	H2 valve opened
6/1/2010	5:56:57 PM	BCl3 valve opened
6/1/2010	5:56:57 PM	SiCl4 pre valve opened
6/1/2010	5:56:57 PM	SiCl4 post valve opened
6/1/2010	5:56:57 PM	Bubbler valve opened
6/1/2010	5:56:57 PM	Helium MFC set to  0.000000
6/1/2010	5:56:57 PM	H2 MFC set to  500.000000
6/1/2010	5:56:57 PM	BCl3 MFC set to  35.000000
6/1/2010	5:56:57 PM	PHl3 MFC set to  0.000000
6/1/2010	5:56:57 PM	SiCl4 MFC set to  50.000000
6/1/2010	5:56:57 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	5:56:57 PM	Tube furnace set to 1000
6/1/2010	6:00:10 PM	Helium valve closed
6/1/2010	6:00:10 PM	PH3 valve closed
6/1/2010	6:00:10 PM	Main Vac valve closed
6/1/2010	6:00:10 PM	Bypass valve closed
6/1/2010	6:00:10 PM	H2 valve opened
6/1/2010	6:00:10 PM	BCl3 valve opened
6/1/2010	6:00:10 PM	SiCl4 pre valve opened
6/1/2010	6:00:10 PM	SiCl4 post valve opened
6/1/2010	6:00:10 PM	Bubbler valve opened
6/1/2010	6:00:10 PM	Helium MFC set to  0.000000
6/1/2010	6:00:10 PM	H2 MFC set to  500.000000
6/1/2010	6:00:10 PM	BCl3 MFC set to  35.000000
6/1/2010	6:00:10 PM	PHl3 MFC set to  0.000000
6/1/2010	6:00:10 PM	SiCl4 MFC set to  50.000000
6/1/2010	6:00:10 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	6:00:10 PM	Tube furnace set to 1000
6/1/2010	6:05:10 PM	H2 valve closed
6/1/2010	6:05:10 PM	BCl3 valve closed
6/1/2010	6:05:10 PM	PH3 valve closed
6/1/2010	6:05:10 PM	SiCl4 pre valve closed
6/1/2010	6:05:10 PM	SiCl4 post valve closed
6/1/2010	6:05:10 PM	Main Vac valve closed
6/1/2010	6:05:11 PM	Bypass valve closed
6/1/2010	6:05:11 PM	Helium valve opened
6/1/2010	6:05:11 PM	Bubbler valve opened
6/1/2010	6:05:11 PM	Helium MFC set to  500.000000
6/1/2010	6:05:11 PM	H2 MFC set to  0.000000
6/1/2010	6:05:11 PM	BCl3 MFC set to  0.000000
6/1/2010	6:05:11 PM	PHl3 MFC set to  0.000000
6/1/2010	6:05:11 PM	SiCl4 MFC set to  0.000000
6/1/2010	6:05:11 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	6:05:11 PM	Tube furnace set to 0
6/1/2010	6:25:11 PM	Helium valve closed
6/1/2010	6:25:11 PM	H2 valve closed
6/1/2010	6:25:11 PM	BCl3 valve closed
6/1/2010	6:25:11 PM	PH3 valve closed
6/1/2010	6:25:11 PM	SiCl4 pre valve closed
6/1/2010	6:25:11 PM	SiCl4 post valve closed
6/1/2010	6:25:11 PM	Main Vac valve closed
6/1/2010	6:25:11 PM	Bypass valve closed
6/1/2010	6:25:11 PM	Bubbler valve closed
6/1/2010	6:25:11 PM	Helium MFC set to  0.000000
6/1/2010	6:25:11 PM	H2 MFC set to  0.000000
6/1/2010	6:25:11 PM	BCl3 MFC set to  0.000000
6/1/2010	6:25:11 PM	PHl3 MFC set to  0.000000
6/1/2010	6:25:11 PM	SiCl4 MFC set to  0.000000
6/1/2010	6:25:11 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	6:25:11 PM	Tube furnace set to 0
6/1/2010	6:25:11 PM	Run finished at 6:25 PM
6/1/2010	9:08:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/1/2010	9:08:56 PM	Recipe started at 9:08 PM
6/1/2010	9:08:56 PM	Helium valve closed
6/1/2010	9:08:56 PM	H2 valve closed
6/1/2010	9:08:56 PM	BCl3 valve closed
6/1/2010	9:08:56 PM	PH3 valve closed
6/1/2010	9:08:56 PM	SiCl4 pre valve closed
6/1/2010	9:08:56 PM	SiCl4 post valve closed
6/1/2010	9:08:56 PM	Main Vac valve closed
6/1/2010	9:08:56 PM	Bubbler valve closed
6/1/2010	9:08:56 PM	Bypass valve opened
6/1/2010	9:08:56 PM	Helium MFC set to  0.000000
6/1/2010	9:08:56 PM	H2 MFC set to  0.000000
6/1/2010	9:08:56 PM	BCl3 MFC set to  0.000000
6/1/2010	9:08:56 PM	PHl3 MFC set to  0.000000
6/1/2010	9:08:56 PM	SiCl4 MFC set to  0.000000
6/1/2010	9:08:56 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:08:56 PM	Tube furnace set to 0
6/1/2010	9:09:45 PM	Helium valve closed
6/1/2010	9:09:45 PM	H2 valve closed
6/1/2010	9:09:45 PM	BCl3 valve closed
6/1/2010	9:09:45 PM	PH3 valve closed
6/1/2010	9:09:45 PM	SiCl4 pre valve closed
6/1/2010	9:09:45 PM	SiCl4 post valve closed
6/1/2010	9:09:45 PM	Bubbler valve closed
6/1/2010	9:09:45 PM	Main Vac valve opened
6/1/2010	9:09:45 PM	Bypass valve opened
6/1/2010	9:09:45 PM	Helium MFC set to  0.000000
6/1/2010	9:09:45 PM	H2 MFC set to  0.000000
6/1/2010	9:09:45 PM	BCl3 MFC set to  0.000000
6/1/2010	9:09:45 PM	PHl3 MFC set to  0.000000
6/1/2010	9:09:45 PM	SiCl4 MFC set to  0.000000
6/1/2010	9:09:45 PM	Bypass solenoid MFC set to  0.000000
6/1/2010	9:09:45 PM	Tube furnace set to 0
6/1/2010	9:09:46 PM	Run finished at 9:09 PM
6/1/2010	9:09:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
